On parameter estimation using level sets

Consider the problem of selecting the member of a parametrized family of curves that best matches a given curve. This is a key step in determining proper values for adjustable parameters in low-order plasma etching and deposition models. Level set methods offer several attractive features for treati...

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Veröffentlicht in:	SIAM journal on control and optimization 1999, Vol.37 (5), p.1372-1393
Hauptverfasser:	BERG, J. M, HOLMSTRÖM, K
Format:	Artikel
Sprache:	eng
Schlagworte:	Algorithms Applied sciences Computer science control theory systems Control theory. Systems Exact sciences and technology Modelling and identification Parameter estimation Plasma etching
Online-Zugang:	Volltext
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