Modeling evaporation, ion-beam assist, and magnetron sputtering of TiO2 thin films over realistic timescales

Results are presented for modeling the growth of TiO2 on the rutile (110) surface. We illustrate how long time scale dynamics techniques can be used to model thin film growth at realistic growth rates. The system evolution between deposition events is achieved through an on-the-fly Kinetic Monte Car...

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Veröffentlicht in:	Journal of materials research 2012-03, Vol.27 (5), p.799-805
Hauptverfasser:	Blackwell, Sabrina, Smith, Roger, Kenny, Steven D., Vernon, Louis J., Walls, John M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied and Technical Physics Biomaterials Energy Inorganic Chemistry Investigations Ion beams Materials Engineering Materials research Materials Science Nanotechnology Plasma Simulation Studies Thin films
Online-Zugang:	Volltext
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