A differential viscosity detector for use in miniaturized chemical separation systems

We present a micromachined differential viscosity detector suitable for integration into an on-chip hydrodynamic chromatography system. The general design, however, is applicable to any liquid chromatography system that is used for separation of polymers. The micromachined part of the detector consi...

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Veröffentlicht in:Journal of microelectromechanical systems 2005-02, Vol.14 (1), p.70-80
Hauptverfasser: Blom, M.T., Chmela, E., van der Heyden, F.H.J., Oosterbroek, R.E., Tijssen, R., Elwenspoek, M., van den Berg, A.
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container_end_page 80
container_issue 1
container_start_page 70
container_title Journal of microelectromechanical systems
container_volume 14
creator Blom, M.T.
Chmela, E.
van der Heyden, F.H.J.
Oosterbroek, R.E.
Tijssen, R.
Elwenspoek, M.
van den Berg, A.
description We present a micromachined differential viscosity detector suitable for integration into an on-chip hydrodynamic chromatography system. The general design, however, is applicable to any liquid chromatography system that is used for separation of polymers. The micromachined part of the detector consists of a fluidic Wheatstone bridge and a low hydraulic capacitance pressure sensor of which the pressure sensing is based on optical detection of a membrane deflection. The stand-alone sensor shows a resolution in specific viscosity of 3/spl times/10/sup -3/, in which specific viscosity is defined as the increase in viscosity by a sample, relative to the baseline viscosity of a solvent.
doi_str_mv 10.1109/JMEMS.2004.840452
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fullrecord <record><control><sourceid>proquest_RIE</sourceid><recordid>TN_cdi_proquest_journals_920555351</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>1390938</ieee_id><sourcerecordid>1019650967</sourcerecordid><originalsourceid>FETCH-LOGICAL-c398t-8763f81c588c4035769bcfbdc13c138ab1a9a93e49cb224ae0c23a91e8f4073b3</originalsourceid><addsrcrecordid>eNpdkF1LwzAUhosoOKc_QLwpguBNZ06TtMnlGPOLDS901yXNTjBjbWeSCvPXm7nBQEjIgTzvy-FJkmsgIwAiH17n0_n7KCeEjQQjjOcnyQAkg4wAF6dxJrzMSuDleXLh_YoQYEwUg2QxTpfWGHTYBqvW6bf1uvM2bNMlBtShc6mJt_eY2jZtbGtV6J39wWWqP7GxOmY8bpRTwXZt6rc-YOMvkzOj1h6vDu8wWTxOPybP2ezt6WUynmWaShEyURbUCNBcCM0I5WUha23qpQYaj1A1KKkkRSZ1nedMIdE5VRJQGEZKWtNhcr_v3bjuq0cfqibuj-u1arHrfQUEZMGJLMqI3v5DV13v2rhdJXPCOaccIgR7SLvOe4em2jjbKLeNTdXOc_Xnudp5rvaeY-buUKx8tGGcarX1x2DBoeScRe5mz1lEPH5TSSQV9BdPV4a2</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>920555351</pqid></control><display><type>article</type><title>A differential viscosity detector for use in miniaturized chemical separation systems</title><source>IEEE/IET Electronic Library</source><creator>Blom, M.T. ; Chmela, E. ; van der Heyden, F.H.J. ; Oosterbroek, R.E. ; Tijssen, R. ; Elwenspoek, M. ; van den Berg, A.</creator><creatorcontrib>Blom, M.T. ; Chmela, E. ; van der Heyden, F.H.J. ; Oosterbroek, R.E. ; Tijssen, R. ; Elwenspoek, M. ; van den Berg, A.</creatorcontrib><description>We present a micromachined differential viscosity detector suitable for integration into an on-chip hydrodynamic chromatography system. The general design, however, is applicable to any liquid chromatography system that is used for separation of polymers. The micromachined part of the detector consists of a fluidic Wheatstone bridge and a low hydraulic capacitance pressure sensor of which the pressure sensing is based on optical detection of a membrane deflection. The stand-alone sensor shows a resolution in specific viscosity of 3/spl times/10/sup -3/, in which specific viscosity is defined as the increase in viscosity by a sample, relative to the baseline viscosity of a solvent.</description><identifier>ISSN: 1057-7157</identifier><identifier>EISSN: 1941-0158</identifier><identifier>DOI: 10.1109/JMEMS.2004.840452</identifier><identifier>CODEN: JMIYET</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Applied fluid mechanics ; Bridge circuits ; Capacitance ; Capacitive sensors ; Chemicals ; Deflection ; Detectors ; Exact sciences and technology ; Fluid dynamics ; Fluid flow ; Fluidics ; Fundamental areas of phenomenology (including applications) ; Hydrodynamics ; Instrumentation for fluid dynamics ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Liquid chromatography ; Mechanical instruments, equipment and techniques ; Microfluidics ; Micromachining ; Micromechanical devices and systems ; Micromechanics ; Optical sensors ; Physics ; Polymers ; System-on-a-chip ; viscometer ; Viscosity ; viscosity detection</subject><ispartof>Journal of microelectromechanical systems, 2005-02, Vol.14 (1), p.70-80</ispartof><rights>2005 INIST-CNRS</rights><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2005</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c398t-8763f81c588c4035769bcfbdc13c138ab1a9a93e49cb224ae0c23a91e8f4073b3</citedby><cites>FETCH-LOGICAL-c398t-8763f81c588c4035769bcfbdc13c138ab1a9a93e49cb224ae0c23a91e8f4073b3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1390938$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27923,27924,54757</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1390938$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&amp;idt=16517554$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Blom, M.T.</creatorcontrib><creatorcontrib>Chmela, E.</creatorcontrib><creatorcontrib>van der Heyden, F.H.J.</creatorcontrib><creatorcontrib>Oosterbroek, R.E.</creatorcontrib><creatorcontrib>Tijssen, R.</creatorcontrib><creatorcontrib>Elwenspoek, M.</creatorcontrib><creatorcontrib>van den Berg, A.</creatorcontrib><title>A differential viscosity detector for use in miniaturized chemical separation systems</title><title>Journal of microelectromechanical systems</title><addtitle>JMEMS</addtitle><description>We present a micromachined differential viscosity detector suitable for integration into an on-chip hydrodynamic chromatography system. The general design, however, is applicable to any liquid chromatography system that is used for separation of polymers. The micromachined part of the detector consists of a fluidic Wheatstone bridge and a low hydraulic capacitance pressure sensor of which the pressure sensing is based on optical detection of a membrane deflection. The stand-alone sensor shows a resolution in specific viscosity of 3/spl times/10/sup -3/, in which specific viscosity is defined as the increase in viscosity by a sample, relative to the baseline viscosity of a solvent.</description><subject>Applied fluid mechanics</subject><subject>Bridge circuits</subject><subject>Capacitance</subject><subject>Capacitive sensors</subject><subject>Chemicals</subject><subject>Deflection</subject><subject>Detectors</subject><subject>Exact sciences and technology</subject><subject>Fluid dynamics</subject><subject>Fluid flow</subject><subject>Fluidics</subject><subject>Fundamental areas of phenomenology (including applications)</subject><subject>Hydrodynamics</subject><subject>Instrumentation for fluid dynamics</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>Liquid chromatography</subject><subject>Mechanical instruments, equipment and techniques</subject><subject>Microfluidics</subject><subject>Micromachining</subject><subject>Micromechanical devices and systems</subject><subject>Micromechanics</subject><subject>Optical sensors</subject><subject>Physics</subject><subject>Polymers</subject><subject>System-on-a-chip</subject><subject>viscometer</subject><subject>Viscosity</subject><subject>viscosity detection</subject><issn>1057-7157</issn><issn>1941-0158</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2005</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNpdkF1LwzAUhosoOKc_QLwpguBNZ06TtMnlGPOLDS901yXNTjBjbWeSCvPXm7nBQEjIgTzvy-FJkmsgIwAiH17n0_n7KCeEjQQjjOcnyQAkg4wAF6dxJrzMSuDleXLh_YoQYEwUg2QxTpfWGHTYBqvW6bf1uvM2bNMlBtShc6mJt_eY2jZtbGtV6J39wWWqP7GxOmY8bpRTwXZt6rc-YOMvkzOj1h6vDu8wWTxOPybP2ezt6WUynmWaShEyURbUCNBcCM0I5WUha23qpQYaj1A1KKkkRSZ1nedMIdE5VRJQGEZKWtNhcr_v3bjuq0cfqibuj-u1arHrfQUEZMGJLMqI3v5DV13v2rhdJXPCOaccIgR7SLvOe4em2jjbKLeNTdXOc_Xnudp5rvaeY-buUKx8tGGcarX1x2DBoeScRe5mz1lEPH5TSSQV9BdPV4a2</recordid><startdate>20050201</startdate><enddate>20050201</enddate><creator>Blom, M.T.</creator><creator>Chmela, E.</creator><creator>van der Heyden, F.H.J.</creator><creator>Oosterbroek, R.E.</creator><creator>Tijssen, R.</creator><creator>Elwenspoek, M.</creator><creator>van den Berg, A.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7TB</scope><scope>7U5</scope><scope>8FD</scope><scope>FR3</scope><scope>L7M</scope><scope>F28</scope></search><sort><creationdate>20050201</creationdate><title>A differential viscosity detector for use in miniaturized chemical separation systems</title><author>Blom, M.T. ; Chmela, E. ; van der Heyden, F.H.J. ; Oosterbroek, R.E. ; Tijssen, R. ; Elwenspoek, M. ; van den Berg, A.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c398t-8763f81c588c4035769bcfbdc13c138ab1a9a93e49cb224ae0c23a91e8f4073b3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2005</creationdate><topic>Applied fluid mechanics</topic><topic>Bridge circuits</topic><topic>Capacitance</topic><topic>Capacitive sensors</topic><topic>Chemicals</topic><topic>Deflection</topic><topic>Detectors</topic><topic>Exact sciences and technology</topic><topic>Fluid dynamics</topic><topic>Fluid flow</topic><topic>Fluidics</topic><topic>Fundamental areas of phenomenology (including applications)</topic><topic>Hydrodynamics</topic><topic>Instrumentation for fluid dynamics</topic><topic>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</topic><topic>Liquid chromatography</topic><topic>Mechanical instruments, equipment and techniques</topic><topic>Microfluidics</topic><topic>Micromachining</topic><topic>Micromechanical devices and systems</topic><topic>Micromechanics</topic><topic>Optical sensors</topic><topic>Physics</topic><topic>Polymers</topic><topic>System-on-a-chip</topic><topic>viscometer</topic><topic>Viscosity</topic><topic>viscosity detection</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Blom, M.T.</creatorcontrib><creatorcontrib>Chmela, E.</creatorcontrib><creatorcontrib>van der Heyden, F.H.J.</creatorcontrib><creatorcontrib>Oosterbroek, R.E.</creatorcontrib><creatorcontrib>Tijssen, R.</creatorcontrib><creatorcontrib>Elwenspoek, M.</creatorcontrib><creatorcontrib>van den Berg, A.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005–Present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998–Present</collection><collection>IEEE/IET Electronic Library</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics &amp; Communications Abstracts</collection><collection>Mechanical &amp; Transportation Engineering Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>ANTE: Abstracts in New Technology &amp; Engineering</collection><jtitle>Journal of microelectromechanical systems</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Blom, M.T.</au><au>Chmela, E.</au><au>van der Heyden, F.H.J.</au><au>Oosterbroek, R.E.</au><au>Tijssen, R.</au><au>Elwenspoek, M.</au><au>van den Berg, A.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>A differential viscosity detector for use in miniaturized chemical separation systems</atitle><jtitle>Journal of microelectromechanical systems</jtitle><stitle>JMEMS</stitle><date>2005-02-01</date><risdate>2005</risdate><volume>14</volume><issue>1</issue><spage>70</spage><epage>80</epage><pages>70-80</pages><issn>1057-7157</issn><eissn>1941-0158</eissn><coden>JMIYET</coden><abstract>We present a micromachined differential viscosity detector suitable for integration into an on-chip hydrodynamic chromatography system. The general design, however, is applicable to any liquid chromatography system that is used for separation of polymers. The micromachined part of the detector consists of a fluidic Wheatstone bridge and a low hydraulic capacitance pressure sensor of which the pressure sensing is based on optical detection of a membrane deflection. The stand-alone sensor shows a resolution in specific viscosity of 3/spl times/10/sup -3/, in which specific viscosity is defined as the increase in viscosity by a sample, relative to the baseline viscosity of a solvent.</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/JMEMS.2004.840452</doi><tpages>11</tpages><oa>free_for_read</oa></addata></record>
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1941-0158
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recordid cdi_proquest_journals_920555351
source IEEE/IET Electronic Library
subjects Applied fluid mechanics
Bridge circuits
Capacitance
Capacitive sensors
Chemicals
Deflection
Detectors
Exact sciences and technology
Fluid dynamics
Fluid flow
Fluidics
Fundamental areas of phenomenology (including applications)
Hydrodynamics
Instrumentation for fluid dynamics
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Liquid chromatography
Mechanical instruments, equipment and techniques
Microfluidics
Micromachining
Micromechanical devices and systems
Micromechanics
Optical sensors
Physics
Polymers
System-on-a-chip
viscometer
Viscosity
viscosity detection
title A differential viscosity detector for use in miniaturized chemical separation systems
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-10T15%3A53%3A01IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=A%20differential%20viscosity%20detector%20for%20use%20in%20miniaturized%20chemical%20separation%20systems&rft.jtitle=Journal%20of%20microelectromechanical%20systems&rft.au=Blom,%20M.T.&rft.date=2005-02-01&rft.volume=14&rft.issue=1&rft.spage=70&rft.epage=80&rft.pages=70-80&rft.issn=1057-7157&rft.eissn=1941-0158&rft.coden=JMIYET&rft_id=info:doi/10.1109/JMEMS.2004.840452&rft_dat=%3Cproquest_RIE%3E1019650967%3C/proquest_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=920555351&rft_id=info:pmid/&rft_ieee_id=1390938&rfr_iscdi=true