Study of Gas Cluster Ion Beam Planarization for Discrete Track Magnetic Disks

We studied planarization of carbon overcoat by gas cluster ion beam (GCIB) for discrete track magnetic disks. We fabricated discrete tracks with variant pitches by focused ion beam on a 30-nm-thick carbon overcoat deposited on magnetic disks, and we planarized them with an Ar GCIB using lateral sput...

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Veröffentlicht in:	IEEE transactions on magnetics 2008-11, Vol.44 (11), p.3476-3479
Hauptverfasser:	Nagato, K., Tani, H., Sakane, Y., Toyoda, N., Yamada, I., Nakao, M., Hamaguchi, T.
Format:	Artikel
Sprache:	eng
Schlagworte:	Acceleration Argon Carbon overcoat Cross-disciplinary physics: materials science rheology discrete track magnetic disks Disk drives Etching Exact sciences and technology gas cluster ion beam Gases Information storage Ion beams Magnetism Materials science Other topics in materials science Physics Planarization Smoothing methods Sputtering Transmission electron microscopy
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