Mechanical Performance of Microcantilevers in Liquids

Microelectromechanical systems (MEMS) are exposed to a variety of liquid environments in applications such as chemical and biological sensors and microfluidic devices. Environmental interactions between liquids and microscale structures can lead to unpredictable performance of MEMS in liquid environ...

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Veröffentlicht in:	Journal of microelectromechanical systems 2011-04, Vol.20 (2), p.441-450
Hauptverfasser:	Ali, S M, Mantell, S C, Longmire, E K
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied fluid mechanics Biological and medical sciences Biosensors Biotechnology Coating Coatings Devices Exact sciences and technology fatigue Fluid dynamics Fluidics Fundamental and applied biological sciences. Psychology Fundamental areas of phenomenology (including applications) Instruments, apparatus, components and techniques common to several branches of physics and astronomy Liquids Mechanical instruments, equipment and techniques Methods. Procedures. Technologies microcantilevers Microelectromechanical systems microelectromechanical systems (MEMS) reliability Micromechanical devices Micromechanical devices and systems Physics Resonant frequencies Resonant frequency Saline Sensors Silicon Stress Titanium Various methods and equipments
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