Electrical, Thermal, and Mechanical Characterization of Silicon Microcantilever Heaters

Silicon atomic force microscope (AFM) cantilevers having integrated solid-state heaters were originally developed for application to data storage, but have since been applied to metrology, thermophysical property measurements, and nanoscale manufacturing. These applications beyond data storage have...

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Veröffentlicht in:	Journal of microelectromechanical systems 2006-12, Vol.15 (6), p.1644-1655
Hauptverfasser:	Jungchul Lee, Beechem, T., Wright, T.L., Nelson, B.A., Graham, S., King, W.P.
Format:	Artikel
Sprache:	eng
Schlagworte:	Aids Atomic force microscopy Atomic measurements Calibration Data storage Exact sciences and technology Force measurement Heated cantilever Heaters Heating equipment Instruments, apparatus, components and techniques common to several branches of physics and astronomy measurement Mechanical instruments, equipment and techniques Memory Metrology microactuators microelectromechanical devices Micromechanical devices and systems Microscopes microsensors Nanomaterials Nanostructure Physics Raman spectroscopy Resistance heating Silicon Solid state circuits stress temperature calibration Thermal force
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