Radiation Dose Effects in Trigate SOI MOS Transistors

N-channel trigate SOI MOSFETs have been irradiated with 60 Co gamma rays at doses up to 6 Mrad(SiO 2 ). The threshold voltage shift at 6 Mrad is less than 10 mV in transistors with a gate length of 0.3 mum. At 6 Mrad(SiO 2 ), the current drive reduction in the same devices is 10% if V G =0 V during...

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