Fracture strength and fatigue of polysilicon determined by a novel thermal actuator [MEMS]
A novel thermal actuator for the determination of polysilicon fracture strength and investigation of its fatigue is presented. The actuator consists of two narrow beams, which expand due to electrical heating, and a cold plate to which a short fracture beam is attached. Because of its small dimensio...
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| Veröffentlicht in: | IEEE transactions on electron devices 2000-07, Vol.47 (7), p.1522-1528 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
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