Emerging simulation approaches for micromachined devices

In this survey paper, we describe and contrast three different approaches for extending circuit simulation to include micromachined devices. The most commonly used method, that of using physical insight to develop parameterized macromodels, is presented first. The issues associated with fitting the...

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Veröffentlicht in:	IEEE transactions on computer-aided design of integrated circuits and systems 2000-12, Vol.19 (12), p.1572-1589
Hauptverfasser:	Mukherjee, T., Fedder, G.K., Ramaswamy, D., White, J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical analysis Circuit simulation Computer displays Computer simulation Design engineering Devices Fabrication Hierarchies Investments Laboratories Mathematical models Micromachining Micromechanics Numerical models Reduced order systems Sensor arrays Solvers
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