Emerging simulation approaches for micromachined devices

In this survey paper, we describe and contrast three different approaches for extending circuit simulation to include micromachined devices. The most commonly used method, that of using physical insight to develop parameterized macromodels, is presented first. The issues associated with fitting the...

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Veröffentlicht in:IEEE transactions on computer-aided design of integrated circuits and systems 2000-12, Vol.19 (12), p.1572-1589
Hauptverfasser: Mukherjee, T., Fedder, G.K., Ramaswamy, D., White, J.
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container_title IEEE transactions on computer-aided design of integrated circuits and systems
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creator Mukherjee, T.
Fedder, G.K.
Ramaswamy, D.
White, J.
description In this survey paper, we describe and contrast three different approaches for extending circuit simulation to include micromachined devices. The most commonly used method, that of using physical insight to develop parameterized macromodels, is presented first. The issues associated with fitting the parameters to simulation data while incorporating design attribute dependencies are considered. The numerical model order reduction approach to macromodeling is presented second, and some of the issues associated with fast solvers and model reduction are summarized. Lastly, we describe the recently developed circuit-based approach for simulating micromachined devices, and describe the design hierarchy and the use of a catalog of parts.
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subjects Chemical analysis
Circuit simulation
Computer displays
Computer simulation
Design engineering
Devices
Fabrication
Hierarchies
Investments
Laboratories
Mathematical models
Micromachining
Micromechanics
Numerical models
Reduced order systems
Sensor arrays
Solvers
title Emerging simulation approaches for micromachined devices
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