Sensitive Gas Analysis System on a Microchip and Application for On-Site Monitoring of NH^sub 3^ in a Clean Room

A portable, highly sensitive, and continuous ammonia gas monitoring system was developed with a microfluidic chip. The system consists of a main unit, a gas pumping unit, and a computer which serves as an operation console. The size of the system is 45 cm width x 30 cm depth x 30 cm height, and the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Analytical chemistry (Washington) 2011-06, Vol.83 (12), p.5017
Hauptverfasser:	Hiki, Shinichiro, Mawatari, Kazuma, Aota, Arata, Saito, Maki, Kitamori, Takehiko
Format:	Artikel
Sprache:	eng
Schlagworte:	Ammonia Membranes Phase transitions Semiconductor research Signal to noise ratio
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!