A Microionizer for Portable Mass Spectrometers Using Double-Gated Isolated Vertically Aligned Carbon Nanofiber Arrays
We report a gas ionizer based on arrays of microfabricated double-gated isolated vertically aligned carbon nanofibers (VA-CNFs) for application in low-power portable mass spectrometers. Field-emitted electrons from VA-CNFs are accelerated to high energy and subsequently collide with neutral gas mole...
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| Veröffentlicht in: | IEEE transactions on electron devices 2011-07, Vol.58 (7), p.2149-2158 |
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| container_title | IEEE transactions on electron devices |
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| creator | Liang-Yu Chen Velasquez-Garcia, L F Xiazhi Wang Teo, K Akinwande, A I |
| description | We report a gas ionizer based on arrays of microfabricated double-gated isolated vertically aligned carbon nanofibers (VA-CNFs) for application in low-power portable mass spectrometers. Field-emitted electrons from VA-CNFs are accelerated to high energy and subsequently collide with neutral gas molecules, leading to ionization/fragmentation of the molecules. Double-gated field-emitter arrays with isolated VA-CNF tips were fabricated using a photoresist planarization technique. Two types of devices were fabricated and characterized. The first type of device has the emitter tip in the same plane as the extraction gate, and the second type of device has the emitter tip 900 nm below the extraction gate. All devices were made using a process that results in gate and focus diameters of 1.7 and 4.2 μm, respectively. When operated as a field-emitted electron impact ionizer (EII), for the same ion current, the ionization efficiency (ratio of ions to emitted electrons) increased from 0.005 to 0.05 as the pressure is increased between 5×10 -6 and 1×10 -3 torr. In comparison with EIIs based on thermionic electron sources, the power dissipation reduced from >;1 W to 100 mW. |
| doi_str_mv | 10.1109/TED.2011.2145419 |
| format | Article |
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Field-emitted electrons from VA-CNFs are accelerated to high energy and subsequently collide with neutral gas molecules, leading to ionization/fragmentation of the molecules. Double-gated field-emitter arrays with isolated VA-CNF tips were fabricated using a photoresist planarization technique. Two types of devices were fabricated and characterized. The first type of device has the emitter tip in the same plane as the extraction gate, and the second type of device has the emitter tip 900 nm below the extraction gate. All devices were made using a process that results in gate and focus diameters of 1.7 and 4.2 μm, respectively. When operated as a field-emitted electron impact ionizer (EII), for the same ion current, the ionization efficiency (ratio of ions to emitted electrons) increased from 0.005 to 0.05 as the pressure is increased between 5×10 -6 and 1×10 -3 torr. In comparison with EIIs based on thermionic electron sources, the power dissipation reduced from >;1 W to 100 mW.</description><identifier>ISSN: 0018-9383</identifier><identifier>EISSN: 1557-9646</identifier><identifier>DOI: 10.1109/TED.2011.2145419</identifier><identifier>CODEN: IETDAI</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Alignment ; Anodes ; Apertures ; Applied sciences ; Arrays ; Carbon fibers ; Devices ; Electronics ; Emittance ; Exact sciences and technology ; Extraction ; Gates ; Ionization ; Ions ; Logic gates ; Mathematical model ; Microelectronic fabrication (materials and surfaces technology) ; Nickel ; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices ; Vacuum microelectronics ; vacuum technology</subject><ispartof>IEEE transactions on electron devices, 2011-07, Vol.58 (7), p.2149-2158</ispartof><rights>2015 INIST-CNRS</rights><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) Jul 2011</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c352t-bbe30801a6b4c4721ae2b54def96f63927e34ae54e071a0681c6fd176baa31433</citedby><cites>FETCH-LOGICAL-c352t-bbe30801a6b4c4721ae2b54def96f63927e34ae54e071a0681c6fd176baa31433</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/5873138$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,27901,27902,54733</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/5873138$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=24327669$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Liang-Yu Chen</creatorcontrib><creatorcontrib>Velasquez-Garcia, L F</creatorcontrib><creatorcontrib>Xiazhi Wang</creatorcontrib><creatorcontrib>Teo, K</creatorcontrib><creatorcontrib>Akinwande, A I</creatorcontrib><title>A Microionizer for Portable Mass Spectrometers Using Double-Gated Isolated Vertically Aligned Carbon Nanofiber Arrays</title><title>IEEE transactions on electron devices</title><addtitle>TED</addtitle><description>We report a gas ionizer based on arrays of microfabricated double-gated isolated vertically aligned carbon nanofibers (VA-CNFs) for application in low-power portable mass spectrometers. Field-emitted electrons from VA-CNFs are accelerated to high energy and subsequently collide with neutral gas molecules, leading to ionization/fragmentation of the molecules. Double-gated field-emitter arrays with isolated VA-CNF tips were fabricated using a photoresist planarization technique. Two types of devices were fabricated and characterized. The first type of device has the emitter tip in the same plane as the extraction gate, and the second type of device has the emitter tip 900 nm below the extraction gate. All devices were made using a process that results in gate and focus diameters of 1.7 and 4.2 μm, respectively. When operated as a field-emitted electron impact ionizer (EII), for the same ion current, the ionization efficiency (ratio of ions to emitted electrons) increased from 0.005 to 0.05 as the pressure is increased between 5×10 -6 and 1×10 -3 torr. In comparison with EIIs based on thermionic electron sources, the power dissipation reduced from >;1 W to 100 mW.</description><subject>Alignment</subject><subject>Anodes</subject><subject>Apertures</subject><subject>Applied sciences</subject><subject>Arrays</subject><subject>Carbon fibers</subject><subject>Devices</subject><subject>Electronics</subject><subject>Emittance</subject><subject>Exact sciences and technology</subject><subject>Extraction</subject><subject>Gates</subject><subject>Ionization</subject><subject>Ions</subject><subject>Logic gates</subject><subject>Mathematical model</subject><subject>Microelectronic fabrication (materials and surfaces technology)</subject><subject>Nickel</subject><subject>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</subject><subject>Vacuum microelectronics</subject><subject>vacuum technology</subject><issn>0018-9383</issn><issn>1557-9646</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2011</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNpdkUlPwzAQhS0EEmW5I3GxkBCnFG9xkmPUskllkViu1iSdIFdpXOzkUH49Lq04cPLY883z6D1Czjgbc86K67eb6VgwzseCq1TxYo-MeJpmSaGV3icjxnieFDKXh-QohEW8aqXEiAwlfbS1d9Z19hs9bZynL873ULVIHyEE-rrCuvduiT36QN-D7T7p1A2xn9xBj3P6EFz7W3yg720NbbumZWs_u_g0AV-5jj5B5xpbRf3Se1iHE3LQQBvwdHcek_fbm7fJfTJ7vnuYlLOklqnok6pCyXLGQVeqVpnggKJK1RybQjdaFiJDqQBThSzjwHTOa93MeaYrAMmVlMfkaqu78u5rwNCbpQ01ti106IZg8kILJgulInnxj1y4wXdxOZNnMjqc5zpCbAtFw0Lw2JiVt0vwa8OZ2aRgYgpmk4LZpRBHLne6EKI1jYeutuFvTigpMq033PmWs4j41043f8fQfgA0RpA7</recordid><startdate>20110701</startdate><enddate>20110701</enddate><creator>Liang-Yu Chen</creator><creator>Velasquez-Garcia, L F</creator><creator>Xiazhi Wang</creator><creator>Teo, K</creator><creator>Akinwande, A I</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>8FD</scope><scope>L7M</scope><scope>F28</scope><scope>FR3</scope></search><sort><creationdate>20110701</creationdate><title>A Microionizer for Portable Mass Spectrometers Using Double-Gated Isolated Vertically Aligned Carbon Nanofiber Arrays</title><author>Liang-Yu Chen ; Velasquez-Garcia, L F ; Xiazhi Wang ; Teo, K ; Akinwande, A I</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c352t-bbe30801a6b4c4721ae2b54def96f63927e34ae54e071a0681c6fd176baa31433</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2011</creationdate><topic>Alignment</topic><topic>Anodes</topic><topic>Apertures</topic><topic>Applied sciences</topic><topic>Arrays</topic><topic>Carbon fibers</topic><topic>Devices</topic><topic>Electronics</topic><topic>Emittance</topic><topic>Exact sciences and technology</topic><topic>Extraction</topic><topic>Gates</topic><topic>Ionization</topic><topic>Ions</topic><topic>Logic gates</topic><topic>Mathematical model</topic><topic>Microelectronic fabrication (materials and surfaces technology)</topic><topic>Nickel</topic><topic>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</topic><topic>Vacuum microelectronics</topic><topic>vacuum technology</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Liang-Yu Chen</creatorcontrib><creatorcontrib>Velasquez-Garcia, L F</creatorcontrib><creatorcontrib>Xiazhi Wang</creatorcontrib><creatorcontrib>Teo, K</creatorcontrib><creatorcontrib>Akinwande, A I</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><jtitle>IEEE transactions on electron devices</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Liang-Yu Chen</au><au>Velasquez-Garcia, L F</au><au>Xiazhi Wang</au><au>Teo, K</au><au>Akinwande, A I</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>A Microionizer for Portable Mass Spectrometers Using Double-Gated Isolated Vertically Aligned Carbon Nanofiber Arrays</atitle><jtitle>IEEE transactions on electron devices</jtitle><stitle>TED</stitle><date>2011-07-01</date><risdate>2011</risdate><volume>58</volume><issue>7</issue><spage>2149</spage><epage>2158</epage><pages>2149-2158</pages><issn>0018-9383</issn><eissn>1557-9646</eissn><coden>IETDAI</coden><abstract>We report a gas ionizer based on arrays of microfabricated double-gated isolated vertically aligned carbon nanofibers (VA-CNFs) for application in low-power portable mass spectrometers. Field-emitted electrons from VA-CNFs are accelerated to high energy and subsequently collide with neutral gas molecules, leading to ionization/fragmentation of the molecules. Double-gated field-emitter arrays with isolated VA-CNF tips were fabricated using a photoresist planarization technique. Two types of devices were fabricated and characterized. The first type of device has the emitter tip in the same plane as the extraction gate, and the second type of device has the emitter tip 900 nm below the extraction gate. All devices were made using a process that results in gate and focus diameters of 1.7 and 4.2 μm, respectively. When operated as a field-emitted electron impact ionizer (EII), for the same ion current, the ionization efficiency (ratio of ions to emitted electrons) increased from 0.005 to 0.05 as the pressure is increased between 5×10 -6 and 1×10 -3 torr. In comparison with EIIs based on thermionic electron sources, the power dissipation reduced from >;1 W to 100 mW.</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/TED.2011.2145419</doi><tpages>10</tpages></addata></record> |
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| subjects | Alignment Anodes Apertures Applied sciences Arrays Carbon fibers Devices Electronics Emittance Exact sciences and technology Extraction Gates Ionization Ions Logic gates Mathematical model Microelectronic fabrication (materials and surfaces technology) Nickel Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Vacuum microelectronics vacuum technology |
| title | A Microionizer for Portable Mass Spectrometers Using Double-Gated Isolated Vertically Aligned Carbon Nanofiber Arrays |
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