Excimer Laser Machining of Bisphenol a Polycarbonate under Closed Immersion Filtered Water with Varying Flow Velocities and the Effects on the Etch Rate

Until now, progress in laser ablation micromachining has been significantly limited with respect to feature miniaturization and output yield by ablation-generated debris. Gas-jetting techniques have proven to be inadequate and vacuum environments are unwieldy in an industrial setting. To this end, a...

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