Capacitive micromachined ultrasonic transducers: fabrication technology

Capacitive micromachined ultrasonic transducer (MUT) technology is a prime candidate for next generation imaging systems. Medical and underwater imaging and the nondestructive evaluation (NDE) societies have expressed growing interest in cMUTs over the years. Capacitive micromachined ultrasonic tran...

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Veröffentlicht in:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2005-12, Vol.52 (12), p.2242-2258
Hauptverfasser:	Erguri, A.S., Yongli Huang, Xuefeng Zhuang, Oralkan, O., Yarahoglu, G.G., Khuri-Yakub, B.T.
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustics Biomedical imaging Biomembranes Biotechnology - instrumentation Biotechnology - methods Electric Capacitance Electronics, Medical Equipment Design - methods Equipment Failure Analysis Etching Exact sciences and technology Fabrication Ferroelectric materials Fundamental areas of phenomenology (including applications) General equipment and techniques Imaging Instruments, apparatus, components and techniques common to several branches of physics and astronomy Machining Membranes, Artificial Microelectrodes Micromachining Micromechanics Miniaturization Nondestructive testing Physics Process control Process controls Temperature Transducers Transduction acoustical devices for the generation and reproduction of sound Ultrasonic imaging Ultrasonic transducers Ultrasonics, quantum acoustics, and physical effects of sound Ultrasonography - instrumentation Ultrasonography - methods Variability
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