Fabricating low-loss hollow optical waveguides via amorphous silicon bonding using dilute KOH solvent

This work explicates a method for fabricating a hollow optical waveguide. Dilute KOH solvent was used to bond two omni-directional reflector (ODR) Si wafers to an amorphous Si thin film on the top of a Si wafer. The resultant bonding interface is very thin, with a thickness that is close to that of...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	IEEE photonics technology letters 2005-12, Vol.17 (12), p.2592-2594
Hauptverfasser:	Lo, Shih-Shou, Chiu, Hua-Kung, Chen, Chii-Chang, Hsu, Shih-Chieh, Liu, Cheng-Yi
Format:	Artikel
Sprache:	eng
Schlagworte:	Amorphous silicon Bonding Dilution hollow Hollow waveguides Optical films Optical sensors optical waveguide Optical waveguides Plasma temperature Propagation losses Semiconductor thin films Silicon Solvents Wafer bonding Wafers
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Schreiben Sie den ersten Kommentar!