Thermal Actuated Solid Tunable Lens
In this letter, the concept of driving tunable solid lens using microthermal actuator is presented. This microoptical device is composed of a flexible polydimethylsiloxane (PDMS) lens, silicon conducting ring, and silicon heater. The mismatching of coefficient of thermal expansion and stiffness betw...
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| Veröffentlicht in: | IEEE photonics technology letters 2006-11, Vol.18 (21), p.2191-2193 |
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| creator | Lee, Sz-yuan Tung, Hsi-wen Chen, Wen-chih Fang, Weileun |
| description | In this letter, the concept of driving tunable solid lens using microthermal actuator is presented. This microoptical device is composed of a flexible polydimethylsiloxane (PDMS) lens, silicon conducting ring, and silicon heater. The mismatching of coefficient of thermal expansion and stiffness between PDMS and silicon will lead to the deformation of polymer lens during heating, so as to further change its focal length. To demonstrate the feasibility of this approach, a microfabrication processes have been established to monolithically fabricate the present microoptical device. The typical experiment results show that the tunable focal length was up to 834 mum with an input current of 70 mA |
| doi_str_mv | 10.1109/LPT.2006.883891 |
| format | Article |
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This microoptical device is composed of a flexible polydimethylsiloxane (PDMS) lens, silicon conducting ring, and silicon heater. The mismatching of coefficient of thermal expansion and stiffness between PDMS and silicon will lead to the deformation of polymer lens during heating, so as to further change its focal length. To demonstrate the feasibility of this approach, a microfabrication processes have been established to monolithically fabricate the present microoptical device. The typical experiment results show that the tunable focal length was up to 834 mum with an input current of 70 mA</description><identifier>ISSN: 1041-1135</identifier><identifier>EISSN: 1941-0174</identifier><identifier>DOI: 10.1109/LPT.2006.883891</identifier><identifier>CODEN: IPTLEL</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Actuators ; Devices ; Feasibility ; Heat transmission ; Heating ; Heating equipment ; Lenses ; Microoptics ; Microoptoelectromechanical system (MOEMS) ; Optical refraction ; polydimethylsiloxane (PDMS) ; Polymers ; Silicon ; Silicone resins ; Solids ; thermal actuator ; Thermal expansion ; Thermal lensing ; tunable lens</subject><ispartof>IEEE photonics technology letters, 2006-11, Vol.18 (21), p.2191-2193</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2006</rights><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c320t-d1ac1f4720acc1412e471e2abd58964b54b4a96e39e92e7494a1cecd19bef40a3</citedby><cites>FETCH-LOGICAL-c320t-d1ac1f4720acc1412e471e2abd58964b54b4a96e39e92e7494a1cecd19bef40a3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1707805$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27915,27916,54749</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1707805$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Lee, Sz-yuan</creatorcontrib><creatorcontrib>Tung, Hsi-wen</creatorcontrib><creatorcontrib>Chen, Wen-chih</creatorcontrib><creatorcontrib>Fang, Weileun</creatorcontrib><title>Thermal Actuated Solid Tunable Lens</title><title>IEEE photonics technology letters</title><addtitle>LPT</addtitle><description>In this letter, the concept of driving tunable solid lens using microthermal actuator is presented. This microoptical device is composed of a flexible polydimethylsiloxane (PDMS) lens, silicon conducting ring, and silicon heater. The mismatching of coefficient of thermal expansion and stiffness between PDMS and silicon will lead to the deformation of polymer lens during heating, so as to further change its focal length. To demonstrate the feasibility of this approach, a microfabrication processes have been established to monolithically fabricate the present microoptical device. The typical experiment results show that the tunable focal length was up to 834 mum with an input current of 70 mA</description><subject>Actuators</subject><subject>Devices</subject><subject>Feasibility</subject><subject>Heat transmission</subject><subject>Heating</subject><subject>Heating equipment</subject><subject>Lenses</subject><subject>Microoptics</subject><subject>Microoptoelectromechanical system (MOEMS)</subject><subject>Optical refraction</subject><subject>polydimethylsiloxane (PDMS)</subject><subject>Polymers</subject><subject>Silicon</subject><subject>Silicone resins</subject><subject>Solids</subject><subject>thermal actuator</subject><subject>Thermal expansion</subject><subject>Thermal lensing</subject><subject>tunable lens</subject><issn>1041-1135</issn><issn>1941-0174</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNpdkM9LxDAQhYMouK6ePXgpevDU3ZkmaZrjsvgLCgrWc0jTKXbptmvSHvzv7VJB8DTv8L3H8DF2jbBCBL3O34pVApCusoxnGk_YArXAGFCJ0ynDlBG5PGcXIewAUEguFuyu-CS_t220ccNoB6qi975tqqgYO1u2FOXUhUt2Vts20NXvXbKPx4di-xznr08v200eO57AEFdoHdZCJWCdQ4EJCYWU2LKSmU5FKUUprE6Ja9IJKaGFRUeuQl1SLcDyJbufdw--_xopDGbfBEdtazvqx2CmFVRST48v2e0_ctePvpueM1macimVPELrGXK-D8FTbQ6-2Vv_bRDMUZmZlJmjMjMrmxo3c6Mhoj9agcpA8h-xE2Uo</recordid><startdate>20061101</startdate><enddate>20061101</enddate><creator>Lee, Sz-yuan</creator><creator>Tung, Hsi-wen</creator><creator>Chen, Wen-chih</creator><creator>Fang, Weileun</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope><scope>F28</scope><scope>FR3</scope></search><sort><creationdate>20061101</creationdate><title>Thermal Actuated Solid Tunable Lens</title><author>Lee, Sz-yuan ; Tung, Hsi-wen ; Chen, Wen-chih ; Fang, Weileun</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c320t-d1ac1f4720acc1412e471e2abd58964b54b4a96e39e92e7494a1cecd19bef40a3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Actuators</topic><topic>Devices</topic><topic>Feasibility</topic><topic>Heat transmission</topic><topic>Heating</topic><topic>Heating equipment</topic><topic>Lenses</topic><topic>Microoptics</topic><topic>Microoptoelectromechanical system (MOEMS)</topic><topic>Optical refraction</topic><topic>polydimethylsiloxane (PDMS)</topic><topic>Polymers</topic><topic>Silicon</topic><topic>Silicone resins</topic><topic>Solids</topic><topic>thermal actuator</topic><topic>Thermal expansion</topic><topic>Thermal lensing</topic><topic>tunable lens</topic><toplevel>online_resources</toplevel><creatorcontrib>Lee, Sz-yuan</creatorcontrib><creatorcontrib>Tung, Hsi-wen</creatorcontrib><creatorcontrib>Chen, Wen-chih</creatorcontrib><creatorcontrib>Fang, Weileun</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) Online</collection><collection>IEEE Xplore</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><jtitle>IEEE photonics technology letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Lee, Sz-yuan</au><au>Tung, Hsi-wen</au><au>Chen, Wen-chih</au><au>Fang, Weileun</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Thermal Actuated Solid Tunable Lens</atitle><jtitle>IEEE photonics technology letters</jtitle><stitle>LPT</stitle><date>2006-11-01</date><risdate>2006</risdate><volume>18</volume><issue>21</issue><spage>2191</spage><epage>2193</epage><pages>2191-2193</pages><issn>1041-1135</issn><eissn>1941-0174</eissn><coden>IPTLEL</coden><abstract>In this letter, the concept of driving tunable solid lens using microthermal actuator is presented. This microoptical device is composed of a flexible polydimethylsiloxane (PDMS) lens, silicon conducting ring, and silicon heater. The mismatching of coefficient of thermal expansion and stiffness between PDMS and silicon will lead to the deformation of polymer lens during heating, so as to further change its focal length. To demonstrate the feasibility of this approach, a microfabrication processes have been established to monolithically fabricate the present microoptical device. The typical experiment results show that the tunable focal length was up to 834 mum with an input current of 70 mA</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/LPT.2006.883891</doi><tpages>3</tpages></addata></record> |
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| identifier | ISSN: 1041-1135 |
| ispartof | IEEE photonics technology letters, 2006-11, Vol.18 (21), p.2191-2193 |
| issn | 1041-1135 1941-0174 |
| language | eng |
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| source | IEEE Xplore |
| subjects | Actuators Devices Feasibility Heat transmission Heating Heating equipment Lenses Microoptics Microoptoelectromechanical system (MOEMS) Optical refraction polydimethylsiloxane (PDMS) Polymers Silicon Silicone resins Solids thermal actuator Thermal expansion Thermal lensing tunable lens |
| title | Thermal Actuated Solid Tunable Lens |
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