Parametric linear modeling of circular cMUT membranes in vacuum
We present a lumped element parametric model for the clamped circular membrane of a capacitive micromachined ultrasonic transducer (cMUT). The model incorporates an electrical port and two sets of acoustic ports, through which the cMUT couples to the medium. The modeling approach is based on matchin...
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| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2007-06, Vol.54 (6), p.1229-1239 |
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| container_end_page | 1239 |
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| container_issue | 6 |
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| container_title | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| container_volume | 54 |
| creator | Koymen, H. Senlik, M.N. Atalar, A. Olcum, S. |
| description | We present a lumped element parametric model for the clamped circular membrane of a capacitive micromachined ultrasonic transducer (cMUT). The model incorporates an electrical port and two sets of acoustic ports, through which the cMUT couples to the medium. The modeling approach is based on matching a lumped element model and the mechanical impedance of the cMUT membrane at the resonance frequencies in vacuum. Very good agreement between finite element simulation results and model impedance is obtained. Equivalent circuit model parameters can be found from material properties and membrane dimensions without a need for finite element simulation |
| doi_str_mv | 10.1109/TUFFC.2007.376 |
| format | Article |
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The model incorporates an electrical port and two sets of acoustic ports, through which the cMUT couples to the medium. The modeling approach is based on matching a lumped element model and the mechanical impedance of the cMUT membrane at the resonance frequencies in vacuum. Very good agreement between finite element simulation results and model impedance is obtained. Equivalent circuit model parameters can be found from material properties and membrane dimensions without a need for finite element simulation</description><identifier>ISSN: 0885-3010</identifier><identifier>EISSN: 1525-8955</identifier><identifier>DOI: 10.1109/TUFFC.2007.376</identifier><identifier>PMID: 17571821</identifier><identifier>CODEN: ITUCER</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Acoustics ; Biomembranes ; Circuit simulation ; Computer Simulation ; Computer-Aided Design ; Coupling circuits ; Electric Capacitance ; Equipment Design ; Equipment Failure Analysis ; Equivalent circuits ; Exact sciences and technology ; Finite element method ; Finite element methods ; Fundamental areas of phenomenology (including applications) ; General equipment and techniques ; Impedance ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Linear Models ; Mathematical analysis ; Mathematical models ; Mechanical impedance ; Membranes ; Membranes, Artificial ; Miniaturization ; Parametric statistics ; Physics ; Ports ; Reproducibility of Results ; Resonance ; Resonant frequency ; Sensitivity and Specificity ; Transducers ; Transduction; acoustical devices for the generation and reproduction of sound ; Ultrasonic transducers ; Ultrasonics, quantum acoustics, and physical effects of sound ; Ultrasonography - instrumentation ; Vacuum</subject><ispartof>IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 2007-06, Vol.54 (6), p.1229-1239</ispartof><rights>2007 INIST-CNRS</rights><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2007</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c473t-d6a5684d50db69a34d6fe65b7b510a872b88fa327957e0dfad674b557404111a3</citedby><cites>FETCH-LOGICAL-c473t-d6a5684d50db69a34d6fe65b7b510a872b88fa327957e0dfad674b557404111a3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/4258838$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,27901,27902,54733</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/4258838$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=18811322$$DView record in Pascal Francis$$Hfree_for_read</backlink><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/17571821$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink></links><search><creatorcontrib>Koymen, H.</creatorcontrib><creatorcontrib>Senlik, M.N.</creatorcontrib><creatorcontrib>Atalar, A.</creatorcontrib><creatorcontrib>Olcum, S.</creatorcontrib><title>Parametric linear modeling of circular cMUT membranes in vacuum</title><title>IEEE transactions on ultrasonics, ferroelectrics, and frequency control</title><addtitle>T-UFFC</addtitle><addtitle>IEEE Trans Ultrason Ferroelectr Freq Control</addtitle><description>We present a lumped element parametric model for the clamped circular membrane of a capacitive micromachined ultrasonic transducer (cMUT). The model incorporates an electrical port and two sets of acoustic ports, through which the cMUT couples to the medium. The modeling approach is based on matching a lumped element model and the mechanical impedance of the cMUT membrane at the resonance frequencies in vacuum. Very good agreement between finite element simulation results and model impedance is obtained. Equivalent circuit model parameters can be found from material properties and membrane dimensions without a need for finite element simulation</description><subject>Acoustics</subject><subject>Biomembranes</subject><subject>Circuit simulation</subject><subject>Computer Simulation</subject><subject>Computer-Aided Design</subject><subject>Coupling circuits</subject><subject>Electric Capacitance</subject><subject>Equipment Design</subject><subject>Equipment Failure Analysis</subject><subject>Equivalent circuits</subject><subject>Exact sciences and technology</subject><subject>Finite element method</subject><subject>Finite element methods</subject><subject>Fundamental areas of phenomenology (including applications)</subject><subject>General equipment and techniques</subject><subject>Impedance</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>Linear Models</subject><subject>Mathematical analysis</subject><subject>Mathematical models</subject><subject>Mechanical impedance</subject><subject>Membranes</subject><subject>Membranes, Artificial</subject><subject>Miniaturization</subject><subject>Parametric statistics</subject><subject>Physics</subject><subject>Ports</subject><subject>Reproducibility of Results</subject><subject>Resonance</subject><subject>Resonant frequency</subject><subject>Sensitivity and Specificity</subject><subject>Transducers</subject><subject>Transduction; acoustical devices for the generation and reproduction of sound</subject><subject>Ultrasonic transducers</subject><subject>Ultrasonics, quantum acoustics, and physical effects of sound</subject><subject>Ultrasonography - instrumentation</subject><subject>Vacuum</subject><issn>0885-3010</issn><issn>1525-8955</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2007</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><sourceid>EIF</sourceid><recordid>eNqF0c9r2zAUB3BRVtq027WXwTCDrSdn7-nn82mM0HSFlu2QnIUsy8XFjjspLvS_n7KEFXZYTxLSR4_39GXsAmGOCNWX1Xq5XMw5gJkLo4_YDBVXJVVKvWEzIFKlAIRTdpbSAwBKWfETdopGGSSOM_b1p4tuCNvY-aLvNsHFYhibkLf3xdgWvot-6vOhv1uviiEMdXSbkIpuUzw5P03DW3bcuj6Fd4f1nK2XV6vF9_L2x_XN4ttt6aUR27LRTmmSjYKm1pUTstFt0Ko2tUJwZHhN1DrBTaVMgKZ1jTayVspIkIjoxDm73Nd9jOOvKaStHbrkQ9_ndsYpWSLQGgh4lp__Kw1oritDr0IhtdJVpTP8-A98GKe4yeNa0pJzLiRmNN8jH8eUYmjtY-wGF58tgt1FZf9EZXdR2RxVfvDhUHWqh9C88EM2GXw6AJe869v8875LL44IUfDdwO_3rgsh_L2WXBEJEr8BEwOhyw</recordid><startdate>20070601</startdate><enddate>20070601</enddate><creator>Koymen, H.</creator><creator>Senlik, M.N.</creator><creator>Atalar, A.</creator><creator>Olcum, S.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. 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| ispartof | IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 2007-06, Vol.54 (6), p.1229-1239 |
| issn | 0885-3010 1525-8955 |
| language | eng |
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| source | IEEE Electronic Library (IEL) |
| subjects | Acoustics Biomembranes Circuit simulation Computer Simulation Computer-Aided Design Coupling circuits Electric Capacitance Equipment Design Equipment Failure Analysis Equivalent circuits Exact sciences and technology Finite element method Finite element methods Fundamental areas of phenomenology (including applications) General equipment and techniques Impedance Instruments, apparatus, components and techniques common to several branches of physics and astronomy Linear Models Mathematical analysis Mathematical models Mechanical impedance Membranes Membranes, Artificial Miniaturization Parametric statistics Physics Ports Reproducibility of Results Resonance Resonant frequency Sensitivity and Specificity Transducers Transduction acoustical devices for the generation and reproduction of sound Ultrasonic transducers Ultrasonics, quantum acoustics, and physical effects of sound Ultrasonography - instrumentation Vacuum |
| title | Parametric linear modeling of circular cMUT membranes in vacuum |
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