Theoretical Study of Some Physical Aspects of Electronic Transport in nMOSFETs at the 10-nm Gate-Length

We discuss selected aspects of the physics of electronic transport in nMOSFETs at the 10-nm scale: Long-range Coulomb interactions, which may degrade performance and even prevent ballistic transport from occurring; scattering with high-k insulator interfacial modes, which depresses the electron mobi...

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Veröffentlicht in:IEEE transactions on electron devices 2007-09, Vol.54 (9), p.2116-2136
Hauptverfasser: Fischetti, M.V., O'Regan, T.P., Sudarshan Narayanan, Sachs, C., Seonghoon Jin, Jiseok Kim, Yan Zhang
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container_end_page 2136
container_issue 9
container_start_page 2116
container_title IEEE transactions on electron devices
container_volume 54
creator Fischetti, M.V.
O'Regan, T.P.
Sudarshan Narayanan
Sachs, C.
Seonghoon Jin
Jiseok Kim
Yan Zhang
description We discuss selected aspects of the physics of electronic transport in nMOSFETs at the 10-nm scale: Long-range Coulomb interactions, which may degrade performance and even prevent ballistic transport from occurring; scattering with high-k insulator interfacial modes, which depresses the electron mobility but is found to affect minimally the saturated transconductance of 15-nm devices; and the use of high-mobility small effective-mass substrates, which poses serious concerns related to performance limitations due to the density-of-states (DOS) bottleneck and to the band-to-band (Zener) leakage current. On the basis of our results, we argue that ballistic transport may not only be unachievable (because of unavoidable electron-electron collisions) but may also be undesirable, as it may enhance the DOS bottleneck. We also argue that the knowledge of low-field mobility is of little use in predicting quantitatively the performance of devices in the saturated region.
doi_str_mv 10.1109/TED.2007.902722
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fullrecord <record><control><sourceid>proquest_RIE</sourceid><recordid>TN_cdi_proquest_journals_863800087</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>4294201</ieee_id><sourcerecordid>880659910</sourcerecordid><originalsourceid>FETCH-LOGICAL-c449t-46cd3b72f2b1fbc79e7adaa12e2ea550943a7f05ea6d1522705e59aa26868b723</originalsourceid><addsrcrecordid>eNqFkT1vGzEMhoWiBeImmTNkETq00znU50ljkDhJAQcuYGcW5DPPvuB8ciV58L-vHBcZOqSTKPJ5SZAvIVcMxoyBvVlM7sccoB5b4DXnn8iIKVVXVkv9mYwAmKmsMOKMfE3ptXy1lHxE1osNhoi5a3xP53m_OtDQ0nnYIv21OaS39G3aYZPTsTDpSxTD0DV0Ef2QdiFm2g10eJ7NHyaLRH2meYOUQTVs6aPPWE1xWOfNBfnS-j7h5d_3nLwU_u6pms4ef97dTqtGSpsrqZuVWNa85UvWLpvaYu1X3jOOHL1SYKXwdQsKvV4xxXldQmW959poU3TinPw49d3F8HuPKbttlxrsez9g2CdnQWipyoX-SxoDWlnLoJDfPySFlEIJIQv47R_wNezjUPZ1RgsDAOY49-YENTGkFLF1u9htfTw4Bu7opCtOuqOT7uRkUVyfFB0ivtOSW8mBiT_Cs5dn</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>863800087</pqid></control><display><type>article</type><title>Theoretical Study of Some Physical Aspects of Electronic Transport in nMOSFETs at the 10-nm Gate-Length</title><source>IEEE Xplore</source><creator>Fischetti, M.V. ; O'Regan, T.P. ; Sudarshan Narayanan ; Sachs, C. ; Seonghoon Jin ; Jiseok Kim ; Yan Zhang</creator><creatorcontrib>Fischetti, M.V. ; O'Regan, T.P. ; Sudarshan Narayanan ; Sachs, C. ; Seonghoon Jin ; Jiseok Kim ; Yan Zhang</creatorcontrib><description>We discuss selected aspects of the physics of electronic transport in nMOSFETs at the 10-nm scale: Long-range Coulomb interactions, which may degrade performance and even prevent ballistic transport from occurring; scattering with high-k insulator interfacial modes, which depresses the electron mobility but is found to affect minimally the saturated transconductance of 15-nm devices; and the use of high-mobility small effective-mass substrates, which poses serious concerns related to performance limitations due to the density-of-states (DOS) bottleneck and to the band-to-band (Zener) leakage current. On the basis of our results, we argue that ballistic transport may not only be unachievable (because of unavoidable electron-electron collisions) but may also be undesirable, as it may enhance the DOS bottleneck. We also argue that the knowledge of low-field mobility is of little use in predicting quantitatively the performance of devices in the saturated region.</description><identifier>ISSN: 0018-9383</identifier><identifier>EISSN: 1557-9646</identifier><identifier>DOI: 10.1109/TED.2007.902722</identifier><identifier>CODEN: IETDAI</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Collisions ; Devices ; Disk operating system (DOS) ; Electron mobility ; Electronics ; High- kappa gate dielectric ; Insulators ; Leakage current ; Logic gates ; low-field mobility ; Materials ; Monte Carlo ; MOSFETs ; Performance evaluation ; scaling ; Scattering ; short channel ; Silicon ; surface optical phonons ; transconductance ; Transport</subject><ispartof>IEEE transactions on electron devices, 2007-09, Vol.54 (9), p.2116-2136</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2007</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c449t-46cd3b72f2b1fbc79e7adaa12e2ea550943a7f05ea6d1522705e59aa26868b723</citedby><cites>FETCH-LOGICAL-c449t-46cd3b72f2b1fbc79e7adaa12e2ea550943a7f05ea6d1522705e59aa26868b723</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/4294201$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,27901,27902,54733</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/4294201$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Fischetti, M.V.</creatorcontrib><creatorcontrib>O'Regan, T.P.</creatorcontrib><creatorcontrib>Sudarshan Narayanan</creatorcontrib><creatorcontrib>Sachs, C.</creatorcontrib><creatorcontrib>Seonghoon Jin</creatorcontrib><creatorcontrib>Jiseok Kim</creatorcontrib><creatorcontrib>Yan Zhang</creatorcontrib><title>Theoretical Study of Some Physical Aspects of Electronic Transport in nMOSFETs at the 10-nm Gate-Length</title><title>IEEE transactions on electron devices</title><addtitle>TED</addtitle><description>We discuss selected aspects of the physics of electronic transport in nMOSFETs at the 10-nm scale: Long-range Coulomb interactions, which may degrade performance and even prevent ballistic transport from occurring; scattering with high-k insulator interfacial modes, which depresses the electron mobility but is found to affect minimally the saturated transconductance of 15-nm devices; and the use of high-mobility small effective-mass substrates, which poses serious concerns related to performance limitations due to the density-of-states (DOS) bottleneck and to the band-to-band (Zener) leakage current. On the basis of our results, we argue that ballistic transport may not only be unachievable (because of unavoidable electron-electron collisions) but may also be undesirable, as it may enhance the DOS bottleneck. We also argue that the knowledge of low-field mobility is of little use in predicting quantitatively the performance of devices in the saturated region.</description><subject>Collisions</subject><subject>Devices</subject><subject>Disk operating system (DOS)</subject><subject>Electron mobility</subject><subject>Electronics</subject><subject>High- kappa gate dielectric</subject><subject>Insulators</subject><subject>Leakage current</subject><subject>Logic gates</subject><subject>low-field mobility</subject><subject>Materials</subject><subject>Monte Carlo</subject><subject>MOSFETs</subject><subject>Performance evaluation</subject><subject>scaling</subject><subject>Scattering</subject><subject>short channel</subject><subject>Silicon</subject><subject>surface optical phonons</subject><subject>transconductance</subject><subject>Transport</subject><issn>0018-9383</issn><issn>1557-9646</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2007</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNqFkT1vGzEMhoWiBeImmTNkETq00znU50ljkDhJAQcuYGcW5DPPvuB8ciV58L-vHBcZOqSTKPJ5SZAvIVcMxoyBvVlM7sccoB5b4DXnn8iIKVVXVkv9mYwAmKmsMOKMfE3ptXy1lHxE1osNhoi5a3xP53m_OtDQ0nnYIv21OaS39G3aYZPTsTDpSxTD0DV0Ef2QdiFm2g10eJ7NHyaLRH2meYOUQTVs6aPPWE1xWOfNBfnS-j7h5d_3nLwU_u6pms4ef97dTqtGSpsrqZuVWNa85UvWLpvaYu1X3jOOHL1SYKXwdQsKvV4xxXldQmW959poU3TinPw49d3F8HuPKbttlxrsez9g2CdnQWipyoX-SxoDWlnLoJDfPySFlEIJIQv47R_wNezjUPZ1RgsDAOY49-YENTGkFLF1u9htfTw4Bu7opCtOuqOT7uRkUVyfFB0ivtOSW8mBiT_Cs5dn</recordid><startdate>20070901</startdate><enddate>20070901</enddate><creator>Fischetti, M.V.</creator><creator>O'Regan, T.P.</creator><creator>Sudarshan Narayanan</creator><creator>Sachs, C.</creator><creator>Seonghoon Jin</creator><creator>Jiseok Kim</creator><creator>Yan Zhang</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>8FD</scope><scope>L7M</scope><scope>F28</scope><scope>FR3</scope></search><sort><creationdate>20070901</creationdate><title>Theoretical Study of Some Physical Aspects of Electronic Transport in nMOSFETs at the 10-nm Gate-Length</title><author>Fischetti, M.V. ; O'Regan, T.P. ; Sudarshan Narayanan ; Sachs, C. ; Seonghoon Jin ; Jiseok Kim ; Yan Zhang</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c449t-46cd3b72f2b1fbc79e7adaa12e2ea550943a7f05ea6d1522705e59aa26868b723</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2007</creationdate><topic>Collisions</topic><topic>Devices</topic><topic>Disk operating system (DOS)</topic><topic>Electron mobility</topic><topic>Electronics</topic><topic>High- kappa gate dielectric</topic><topic>Insulators</topic><topic>Leakage current</topic><topic>Logic gates</topic><topic>low-field mobility</topic><topic>Materials</topic><topic>Monte Carlo</topic><topic>MOSFETs</topic><topic>Performance evaluation</topic><topic>scaling</topic><topic>Scattering</topic><topic>short channel</topic><topic>Silicon</topic><topic>surface optical phonons</topic><topic>transconductance</topic><topic>Transport</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Fischetti, M.V.</creatorcontrib><creatorcontrib>O'Regan, T.P.</creatorcontrib><creatorcontrib>Sudarshan Narayanan</creatorcontrib><creatorcontrib>Sachs, C.</creatorcontrib><creatorcontrib>Seonghoon Jin</creatorcontrib><creatorcontrib>Jiseok Kim</creatorcontrib><creatorcontrib>Yan Zhang</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Xplore</collection><collection>CrossRef</collection><collection>Electronics &amp; Communications Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>ANTE: Abstracts in New Technology &amp; Engineering</collection><collection>Engineering Research Database</collection><jtitle>IEEE transactions on electron devices</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Fischetti, M.V.</au><au>O'Regan, T.P.</au><au>Sudarshan Narayanan</au><au>Sachs, C.</au><au>Seonghoon Jin</au><au>Jiseok Kim</au><au>Yan Zhang</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Theoretical Study of Some Physical Aspects of Electronic Transport in nMOSFETs at the 10-nm Gate-Length</atitle><jtitle>IEEE transactions on electron devices</jtitle><stitle>TED</stitle><date>2007-09-01</date><risdate>2007</risdate><volume>54</volume><issue>9</issue><spage>2116</spage><epage>2136</epage><pages>2116-2136</pages><issn>0018-9383</issn><eissn>1557-9646</eissn><coden>IETDAI</coden><abstract>We discuss selected aspects of the physics of electronic transport in nMOSFETs at the 10-nm scale: Long-range Coulomb interactions, which may degrade performance and even prevent ballistic transport from occurring; scattering with high-k insulator interfacial modes, which depresses the electron mobility but is found to affect minimally the saturated transconductance of 15-nm devices; and the use of high-mobility small effective-mass substrates, which poses serious concerns related to performance limitations due to the density-of-states (DOS) bottleneck and to the band-to-band (Zener) leakage current. On the basis of our results, we argue that ballistic transport may not only be unachievable (because of unavoidable electron-electron collisions) but may also be undesirable, as it may enhance the DOS bottleneck. We also argue that the knowledge of low-field mobility is of little use in predicting quantitatively the performance of devices in the saturated region.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/TED.2007.902722</doi><tpages>21</tpages></addata></record>
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subjects Collisions
Devices
Disk operating system (DOS)
Electron mobility
Electronics
High- kappa gate dielectric
Insulators
Leakage current
Logic gates
low-field mobility
Materials
Monte Carlo
MOSFETs
Performance evaluation
scaling
Scattering
short channel
Silicon
surface optical phonons
transconductance
Transport
title Theoretical Study of Some Physical Aspects of Electronic Transport in nMOSFETs at the 10-nm Gate-Length
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-07T16%3A17%3A42IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Theoretical%20Study%20of%20Some%20Physical%20Aspects%20of%20Electronic%20Transport%20in%20nMOSFETs%20at%20the%2010-nm%20Gate-Length&rft.jtitle=IEEE%20transactions%20on%20electron%20devices&rft.au=Fischetti,%20M.V.&rft.date=2007-09-01&rft.volume=54&rft.issue=9&rft.spage=2116&rft.epage=2136&rft.pages=2116-2136&rft.issn=0018-9383&rft.eissn=1557-9646&rft.coden=IETDAI&rft_id=info:doi/10.1109/TED.2007.902722&rft_dat=%3Cproquest_RIE%3E880659910%3C/proquest_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=863800087&rft_id=info:pmid/&rft_ieee_id=4294201&rfr_iscdi=true