Theoretical Study of Some Physical Aspects of Electronic Transport in nMOSFETs at the 10-nm Gate-Length
We discuss selected aspects of the physics of electronic transport in nMOSFETs at the 10-nm scale: Long-range Coulomb interactions, which may degrade performance and even prevent ballistic transport from occurring; scattering with high-k insulator interfacial modes, which depresses the electron mobi...
Gespeichert in:
Veröffentlicht in: | IEEE transactions on electron devices 2007-09, Vol.54 (9), p.2116-2136 |
---|---|
Hauptverfasser: | , , , , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
container_end_page | 2136 |
---|---|
container_issue | 9 |
container_start_page | 2116 |
container_title | IEEE transactions on electron devices |
container_volume | 54 |
creator | Fischetti, M.V. O'Regan, T.P. Sudarshan Narayanan Sachs, C. Seonghoon Jin Jiseok Kim Yan Zhang |
description | We discuss selected aspects of the physics of electronic transport in nMOSFETs at the 10-nm scale: Long-range Coulomb interactions, which may degrade performance and even prevent ballistic transport from occurring; scattering with high-k insulator interfacial modes, which depresses the electron mobility but is found to affect minimally the saturated transconductance of 15-nm devices; and the use of high-mobility small effective-mass substrates, which poses serious concerns related to performance limitations due to the density-of-states (DOS) bottleneck and to the band-to-band (Zener) leakage current. On the basis of our results, we argue that ballistic transport may not only be unachievable (because of unavoidable electron-electron collisions) but may also be undesirable, as it may enhance the DOS bottleneck. We also argue that the knowledge of low-field mobility is of little use in predicting quantitatively the performance of devices in the saturated region. |
doi_str_mv | 10.1109/TED.2007.902722 |
format | Article |
fullrecord | <record><control><sourceid>proquest_RIE</sourceid><recordid>TN_cdi_proquest_journals_863800087</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>4294201</ieee_id><sourcerecordid>880659910</sourcerecordid><originalsourceid>FETCH-LOGICAL-c449t-46cd3b72f2b1fbc79e7adaa12e2ea550943a7f05ea6d1522705e59aa26868b723</originalsourceid><addsrcrecordid>eNqFkT1vGzEMhoWiBeImmTNkETq00znU50ljkDhJAQcuYGcW5DPPvuB8ciV58L-vHBcZOqSTKPJ5SZAvIVcMxoyBvVlM7sccoB5b4DXnn8iIKVVXVkv9mYwAmKmsMOKMfE3ptXy1lHxE1osNhoi5a3xP53m_OtDQ0nnYIv21OaS39G3aYZPTsTDpSxTD0DV0Ef2QdiFm2g10eJ7NHyaLRH2meYOUQTVs6aPPWE1xWOfNBfnS-j7h5d_3nLwU_u6pms4ef97dTqtGSpsrqZuVWNa85UvWLpvaYu1X3jOOHL1SYKXwdQsKvV4xxXldQmW959poU3TinPw49d3F8HuPKbttlxrsez9g2CdnQWipyoX-SxoDWlnLoJDfPySFlEIJIQv47R_wNezjUPZ1RgsDAOY49-YENTGkFLF1u9htfTw4Bu7opCtOuqOT7uRkUVyfFB0ivtOSW8mBiT_Cs5dn</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>863800087</pqid></control><display><type>article</type><title>Theoretical Study of Some Physical Aspects of Electronic Transport in nMOSFETs at the 10-nm Gate-Length</title><source>IEEE Xplore</source><creator>Fischetti, M.V. ; O'Regan, T.P. ; Sudarshan Narayanan ; Sachs, C. ; Seonghoon Jin ; Jiseok Kim ; Yan Zhang</creator><creatorcontrib>Fischetti, M.V. ; O'Regan, T.P. ; Sudarshan Narayanan ; Sachs, C. ; Seonghoon Jin ; Jiseok Kim ; Yan Zhang</creatorcontrib><description>We discuss selected aspects of the physics of electronic transport in nMOSFETs at the 10-nm scale: Long-range Coulomb interactions, which may degrade performance and even prevent ballistic transport from occurring; scattering with high-k insulator interfacial modes, which depresses the electron mobility but is found to affect minimally the saturated transconductance of 15-nm devices; and the use of high-mobility small effective-mass substrates, which poses serious concerns related to performance limitations due to the density-of-states (DOS) bottleneck and to the band-to-band (Zener) leakage current. On the basis of our results, we argue that ballistic transport may not only be unachievable (because of unavoidable electron-electron collisions) but may also be undesirable, as it may enhance the DOS bottleneck. We also argue that the knowledge of low-field mobility is of little use in predicting quantitatively the performance of devices in the saturated region.</description><identifier>ISSN: 0018-9383</identifier><identifier>EISSN: 1557-9646</identifier><identifier>DOI: 10.1109/TED.2007.902722</identifier><identifier>CODEN: IETDAI</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Collisions ; Devices ; Disk operating system (DOS) ; Electron mobility ; Electronics ; High- kappa gate dielectric ; Insulators ; Leakage current ; Logic gates ; low-field mobility ; Materials ; Monte Carlo ; MOSFETs ; Performance evaluation ; scaling ; Scattering ; short channel ; Silicon ; surface optical phonons ; transconductance ; Transport</subject><ispartof>IEEE transactions on electron devices, 2007-09, Vol.54 (9), p.2116-2136</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2007</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c449t-46cd3b72f2b1fbc79e7adaa12e2ea550943a7f05ea6d1522705e59aa26868b723</citedby><cites>FETCH-LOGICAL-c449t-46cd3b72f2b1fbc79e7adaa12e2ea550943a7f05ea6d1522705e59aa26868b723</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/4294201$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,27901,27902,54733</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/4294201$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Fischetti, M.V.</creatorcontrib><creatorcontrib>O'Regan, T.P.</creatorcontrib><creatorcontrib>Sudarshan Narayanan</creatorcontrib><creatorcontrib>Sachs, C.</creatorcontrib><creatorcontrib>Seonghoon Jin</creatorcontrib><creatorcontrib>Jiseok Kim</creatorcontrib><creatorcontrib>Yan Zhang</creatorcontrib><title>Theoretical Study of Some Physical Aspects of Electronic Transport in nMOSFETs at the 10-nm Gate-Length</title><title>IEEE transactions on electron devices</title><addtitle>TED</addtitle><description>We discuss selected aspects of the physics of electronic transport in nMOSFETs at the 10-nm scale: Long-range Coulomb interactions, which may degrade performance and even prevent ballistic transport from occurring; scattering with high-k insulator interfacial modes, which depresses the electron mobility but is found to affect minimally the saturated transconductance of 15-nm devices; and the use of high-mobility small effective-mass substrates, which poses serious concerns related to performance limitations due to the density-of-states (DOS) bottleneck and to the band-to-band (Zener) leakage current. On the basis of our results, we argue that ballistic transport may not only be unachievable (because of unavoidable electron-electron collisions) but may also be undesirable, as it may enhance the DOS bottleneck. We also argue that the knowledge of low-field mobility is of little use in predicting quantitatively the performance of devices in the saturated region.</description><subject>Collisions</subject><subject>Devices</subject><subject>Disk operating system (DOS)</subject><subject>Electron mobility</subject><subject>Electronics</subject><subject>High- kappa gate dielectric</subject><subject>Insulators</subject><subject>Leakage current</subject><subject>Logic gates</subject><subject>low-field mobility</subject><subject>Materials</subject><subject>Monte Carlo</subject><subject>MOSFETs</subject><subject>Performance evaluation</subject><subject>scaling</subject><subject>Scattering</subject><subject>short channel</subject><subject>Silicon</subject><subject>surface optical phonons</subject><subject>transconductance</subject><subject>Transport</subject><issn>0018-9383</issn><issn>1557-9646</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2007</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNqFkT1vGzEMhoWiBeImmTNkETq00znU50ljkDhJAQcuYGcW5DPPvuB8ciV58L-vHBcZOqSTKPJ5SZAvIVcMxoyBvVlM7sccoB5b4DXnn8iIKVVXVkv9mYwAmKmsMOKMfE3ptXy1lHxE1osNhoi5a3xP53m_OtDQ0nnYIv21OaS39G3aYZPTsTDpSxTD0DV0Ef2QdiFm2g10eJ7NHyaLRH2meYOUQTVs6aPPWE1xWOfNBfnS-j7h5d_3nLwU_u6pms4ef97dTqtGSpsrqZuVWNa85UvWLpvaYu1X3jOOHL1SYKXwdQsKvV4xxXldQmW959poU3TinPw49d3F8HuPKbttlxrsez9g2CdnQWipyoX-SxoDWlnLoJDfPySFlEIJIQv47R_wNezjUPZ1RgsDAOY49-YENTGkFLF1u9htfTw4Bu7opCtOuqOT7uRkUVyfFB0ivtOSW8mBiT_Cs5dn</recordid><startdate>20070901</startdate><enddate>20070901</enddate><creator>Fischetti, M.V.</creator><creator>O'Regan, T.P.</creator><creator>Sudarshan Narayanan</creator><creator>Sachs, C.</creator><creator>Seonghoon Jin</creator><creator>Jiseok Kim</creator><creator>Yan Zhang</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>8FD</scope><scope>L7M</scope><scope>F28</scope><scope>FR3</scope></search><sort><creationdate>20070901</creationdate><title>Theoretical Study of Some Physical Aspects of Electronic Transport in nMOSFETs at the 10-nm Gate-Length</title><author>Fischetti, M.V. ; O'Regan, T.P. ; Sudarshan Narayanan ; Sachs, C. ; Seonghoon Jin ; Jiseok Kim ; Yan Zhang</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c449t-46cd3b72f2b1fbc79e7adaa12e2ea550943a7f05ea6d1522705e59aa26868b723</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2007</creationdate><topic>Collisions</topic><topic>Devices</topic><topic>Disk operating system (DOS)</topic><topic>Electron mobility</topic><topic>Electronics</topic><topic>High- kappa gate dielectric</topic><topic>Insulators</topic><topic>Leakage current</topic><topic>Logic gates</topic><topic>low-field mobility</topic><topic>Materials</topic><topic>Monte Carlo</topic><topic>MOSFETs</topic><topic>Performance evaluation</topic><topic>scaling</topic><topic>Scattering</topic><topic>short channel</topic><topic>Silicon</topic><topic>surface optical phonons</topic><topic>transconductance</topic><topic>Transport</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Fischetti, M.V.</creatorcontrib><creatorcontrib>O'Regan, T.P.</creatorcontrib><creatorcontrib>Sudarshan Narayanan</creatorcontrib><creatorcontrib>Sachs, C.</creatorcontrib><creatorcontrib>Seonghoon Jin</creatorcontrib><creatorcontrib>Jiseok Kim</creatorcontrib><creatorcontrib>Yan Zhang</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Xplore</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><jtitle>IEEE transactions on electron devices</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Fischetti, M.V.</au><au>O'Regan, T.P.</au><au>Sudarshan Narayanan</au><au>Sachs, C.</au><au>Seonghoon Jin</au><au>Jiseok Kim</au><au>Yan Zhang</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Theoretical Study of Some Physical Aspects of Electronic Transport in nMOSFETs at the 10-nm Gate-Length</atitle><jtitle>IEEE transactions on electron devices</jtitle><stitle>TED</stitle><date>2007-09-01</date><risdate>2007</risdate><volume>54</volume><issue>9</issue><spage>2116</spage><epage>2136</epage><pages>2116-2136</pages><issn>0018-9383</issn><eissn>1557-9646</eissn><coden>IETDAI</coden><abstract>We discuss selected aspects of the physics of electronic transport in nMOSFETs at the 10-nm scale: Long-range Coulomb interactions, which may degrade performance and even prevent ballistic transport from occurring; scattering with high-k insulator interfacial modes, which depresses the electron mobility but is found to affect minimally the saturated transconductance of 15-nm devices; and the use of high-mobility small effective-mass substrates, which poses serious concerns related to performance limitations due to the density-of-states (DOS) bottleneck and to the band-to-band (Zener) leakage current. On the basis of our results, we argue that ballistic transport may not only be unachievable (because of unavoidable electron-electron collisions) but may also be undesirable, as it may enhance the DOS bottleneck. We also argue that the knowledge of low-field mobility is of little use in predicting quantitatively the performance of devices in the saturated region.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/TED.2007.902722</doi><tpages>21</tpages></addata></record> |
fulltext | fulltext_linktorsrc |
identifier | ISSN: 0018-9383 |
ispartof | IEEE transactions on electron devices, 2007-09, Vol.54 (9), p.2116-2136 |
issn | 0018-9383 1557-9646 |
language | eng |
recordid | cdi_proquest_journals_863800087 |
source | IEEE Xplore |
subjects | Collisions Devices Disk operating system (DOS) Electron mobility Electronics High- kappa gate dielectric Insulators Leakage current Logic gates low-field mobility Materials Monte Carlo MOSFETs Performance evaluation scaling Scattering short channel Silicon surface optical phonons transconductance Transport |
title | Theoretical Study of Some Physical Aspects of Electronic Transport in nMOSFETs at the 10-nm Gate-Length |
url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-07T16%3A17%3A42IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Theoretical%20Study%20of%20Some%20Physical%20Aspects%20of%20Electronic%20Transport%20in%20nMOSFETs%20at%20the%2010-nm%20Gate-Length&rft.jtitle=IEEE%20transactions%20on%20electron%20devices&rft.au=Fischetti,%20M.V.&rft.date=2007-09-01&rft.volume=54&rft.issue=9&rft.spage=2116&rft.epage=2136&rft.pages=2116-2136&rft.issn=0018-9383&rft.eissn=1557-9646&rft.coden=IETDAI&rft_id=info:doi/10.1109/TED.2007.902722&rft_dat=%3Cproquest_RIE%3E880659910%3C/proquest_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=863800087&rft_id=info:pmid/&rft_ieee_id=4294201&rfr_iscdi=true |