Sensitive and Selective Photoacoustic Gas Sensor Suitable for High-Volume Manufacturing
Sensitive and selective gas measurements are crucial for a large variety of applications. This paper describes the manufacturing and characterization of a photoacoustic gas sensor system. The system is based on a pressure sensor element with a sensitivity of 10 muV/V/Pa. To demonstrate and evaluate...
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| Veröffentlicht in: | IEEE sensors journal 2008-09, Vol.8 (9), p.1539-1545 |
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| creator | Schjolberg-Henriksen, K. Schulz, O. Ferber, A. Moe, S. Lloyd, M. Muller, G. Suphan, K.-H. Wang, D.T. Bernstein, R.W. |
| description | Sensitive and selective gas measurements are crucial for a large variety of applications. This paper describes the manufacturing and characterization of a photoacoustic gas sensor system. The system is based on a pressure sensor element with a sensitivity of 10 muV/V/Pa. To demonstrate and evaluate the concept, 12 prototypes for measuring CO 2 have been manufactured and characterized. Detection limits ranging from 92 ppm to below 6 ppm CO 2 were obtained with a path length of 10 cm, depending on the measurement time and photoacoustic cell design. Measurements showed no cross-sensitivity towards CO, CH 4 , or humidity in any of the sensors. The temperature drift of the uncompensated raw signal of two sensor designs was below 117 ppm CO 2 in the range from 25degC to 50degC. |
| doi_str_mv | 10.1109/JSEN.2008.923588 |
| format | Article |
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This paper describes the manufacturing and characterization of a photoacoustic gas sensor system. The system is based on a pressure sensor element with a sensitivity of 10 muV/V/Pa. To demonstrate and evaluate the concept, 12 prototypes for measuring CO 2 have been manufactured and characterized. Detection limits ranging from 92 ppm to below 6 ppm CO 2 were obtained with a path length of 10 cm, depending on the measurement time and photoacoustic cell design. Measurements showed no cross-sensitivity towards CO, CH 4 , or humidity in any of the sensors. 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This paper describes the manufacturing and characterization of a photoacoustic gas sensor system. The system is based on a pressure sensor element with a sensitivity of 10 muV/V/Pa. To demonstrate and evaluate the concept, 12 prototypes for measuring CO 2 have been manufactured and characterized. Detection limits ranging from 92 ppm to below 6 ppm CO 2 were obtained with a path length of 10 cm, depending on the measurement time and photoacoustic cell design. Measurements showed no cross-sensitivity towards CO, CH 4 , or humidity in any of the sensors. The temperature drift of the uncompensated raw signal of two sensor designs was below 117 ppm CO 2 in the range from 25degC to 50degC.</description><subject>Carbon dioxide</subject><subject>Carbon monoxide</subject><subject>Design engineering</subject><subject>Gas detectors</subject><subject>Gas sensors</subject><subject>Humidity</subject><subject>Humidity measurement</subject><subject>Length measurement</subject><subject>microelectromechanical devices</subject><subject>microsensors</subject><subject>Photoacoustic cells</subject><subject>photoacoustic effects</subject><subject>Pressure measurement</subject><subject>Pressure sensors</subject><subject>Prototypes</subject><subject>Pulp manufacturing</subject><subject>semiconductor device measurements</subject><subject>sensitivity</subject><subject>Sensor phenomena and characterization</subject><subject>Sensor systems</subject><subject>Sensors</subject><subject>Temperature sensors</subject><subject>Time measurement</subject><issn>1530-437X</issn><issn>1558-1748</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2008</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNqFkctLxDAQxoso-LwLXooHPXXNs02OIuuq-IL1dQtpMtmNdNu1aQX_e1NXPHjQ08wwvxm-mS9J9jEaYYzkydV0fDsiCImRJJQLsZZsYc5Fhgsm1oecoozR4mUz2Q7hFSEsC15sJc9TqIPv_DukurbpFCowX9X9vOkabZo-dN6kEx3SgWzadNr7TpcVpC4WF342z56aql9AeqPr3mnT9a2vZ7vJhtNVgL3vuJM8no8fzi6y67vJ5dnpdWYYJV3mrMU2d4V0kkiuDQJJwJWltaSkrLCc0CjUUWHjTRows6VmTGhiLJRIY7qTHK_2LtvmrYfQqYUPBqpK1xC1K4lozvL4l39JUXAUH0REJI_-JCljvKAij-DhL_C16ds63qtilwma5yxCaAWZtgmhBaeWrV_o9kNhpAbr1GCdGqxTK-viyMFqxAPAD864FEJg-gk5QZV0</recordid><startdate>20080901</startdate><enddate>20080901</enddate><creator>Schjolberg-Henriksen, K.</creator><creator>Schulz, O.</creator><creator>Ferber, A.</creator><creator>Moe, S.</creator><creator>Lloyd, M.</creator><creator>Muller, G.</creator><creator>Suphan, K.-H.</creator><creator>Wang, D.T.</creator><creator>Bernstein, R.W.</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. 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This paper describes the manufacturing and characterization of a photoacoustic gas sensor system. The system is based on a pressure sensor element with a sensitivity of 10 muV/V/Pa. To demonstrate and evaluate the concept, 12 prototypes for measuring CO 2 have been manufactured and characterized. Detection limits ranging from 92 ppm to below 6 ppm CO 2 were obtained with a path length of 10 cm, depending on the measurement time and photoacoustic cell design. Measurements showed no cross-sensitivity towards CO, CH 4 , or humidity in any of the sensors. The temperature drift of the uncompensated raw signal of two sensor designs was below 117 ppm CO 2 in the range from 25degC to 50degC.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/JSEN.2008.923588</doi><tpages>7</tpages></addata></record> |
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| subjects | Carbon dioxide Carbon monoxide Design engineering Gas detectors Gas sensors Humidity Humidity measurement Length measurement microelectromechanical devices microsensors Photoacoustic cells photoacoustic effects Pressure measurement Pressure sensors Prototypes Pulp manufacturing semiconductor device measurements sensitivity Sensor phenomena and characterization Sensor systems Sensors Temperature sensors Time measurement |
| title | Sensitive and Selective Photoacoustic Gas Sensor Suitable for High-Volume Manufacturing |
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