Integrated CMOS Sensor Array for Optical Heterodyne Phase Sensing

A heterodyne interferometric CMOS 8 × 8 phase sensor array was developed to measure the spatial phase distribution of an optical wavefront. This sensor is suitable for measuring rapidly changing surface profiles and characterizing fast turbulence. Using an acousto-optic modulation frequency of 80 MH...

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Veröffentlicht in:	IEEE sensors journal 2011-06, Vol.11 (6), p.1516-1521
Hauptverfasser:	Furth, Paul M, Ponnapureddy, Vamsy, Dundigal, Sreeker R, Voelz, David G, Korupolu, Ramesh, Garimella, Annajirao, Rashid, M Wasequr
Format:	Artikel
Sprache:	eng
Schlagworte:	Adaptive optics Arrays Beat frequencies CMOS CMOS integrated optics Detectors Digitization gray-to-binary conversion heterodyne interferometer heterodyne optical phase sensor Optical interferometry Optical mixing Optical sensors phase detector Phase error Phase measurement Position (location) Sensor arrays Sensors zero crossing
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