Interference of Surface Plasmon Waves and Plasmon Coupled Waveguide Modes for the Patterning of Thin Film

We analyze and propose a thin-film patterning method based on Kretschmann's attenuated total reflection (ATR) configuration where the surface plasmon mode and plasmon coupled waveguide modes coupled into a target photosensitive layer are generated. By analyzing stratified media with the help of...

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Veröffentlicht in:	IEEE journal of quantum electronics 2008-04, Vol.44 (4), p.305-311
Hauptverfasser:	LIM, Yongjun, KIM, Seyoon, KIM, Hwi, JUNG, Jaehoon, LEE, Byoungho
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Attenuation Circuit properties Collective excitations (including excitons, polarons, plasmons and other charge-density excitations) Condensed matter: electronic structure, electrical, magnetic, and optical properties Coupled mode analysis Electric, optical and optoelectronic circuits Electromagnetic fields Electromagnetic waveguides Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Electronics Exact sciences and technology Fundamental areas of phenomenology (including applications) Integrated optics. Optical fibers and wave guides Interference Lithography Mathematical models Optical and optoelectronic circuits Optical elements, devices, and systems Optical films Optical lithography Optical surface waves Optical waveguides Optical waveguides and coupleurs Optics Pattern analysis Patterning Physics plasmon coupled waveguide mode Plasmons Surface and interface electron states surface plasmon resonance Surface waves Thin films thin-film patterning Transistors Waveguides
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