Integrated high-temperature piezoelectric plate acoustic wave transducers using mode conversion

Piezoelectric thick (>66 mum) films have been directly coated onto aluminum (Al) substrates using a sol-gel spray technique. With top electrode, these films serve as integrated ultrasonic transducers (IUT), which normally operate as thickness longitudinal wave transducers. When such IUT are locat...

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Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2009-06, Vol.56 (6), p.1218-1224
Hauptverfasser: Kuo-ting Wu, Kobayashi, M., Cheng-kuei Jen
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container_issue 6
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container_title IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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creator Kuo-ting Wu
Kobayashi, M.
Cheng-kuei Jen
description Piezoelectric thick (>66 mum) films have been directly coated onto aluminum (Al) substrates using a sol-gel spray technique. With top electrode, these films serve as integrated ultrasonic transducers (IUT), which normally operate as thickness longitudinal wave transducers. When such IUT are located at the edges of the metallic plates, they can excite and detect symmetrical, antisymmetric and shear horizontal types of plate acoustic waves (PAW) using mode conversion methods. In 2 mm thick Al plates, 2 line defects of 1 mm width and 1 mm depth were clearly detected at temperatures up to 150degC in pulse-echo mode. Results indicated that, for 2 mm thick aluminum plates, shear horizontal PAW were the best for the line defect detection. Also, the experimental results agree well with those obtained by a finite-difference-based method.
doi_str_mv 10.1109/TUFFC.2009.1163
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subjects Acoustic signal detection
Acoustic transducers
Acoustic waves
Acoustics
Acoustics - instrumentation
Aluminum
Computer-Aided Design
Dislocations
Electrodes
Equipment Design
Equipment Failure Analysis
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Horizontal
Membranes, Artificial
Micro-Electrical-Mechanical Systems - instrumentation
Physics
Piezoelectric films
Piezoelectric transducers
Piezoelectricity
Plasma welding
Reproducibility of Results
Sensitivity and Specificity
Shear
Spraying
Systems Integration
Temperature
Thick films
Transducers
Transduction
acoustical devices for the generation and reproduction of sound
Ultrasonic transducers
title Integrated high-temperature piezoelectric plate acoustic wave transducers using mode conversion
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