Optical Filters Utilizing Ion Implanted Bragg Gratings in SOI Waveguides
The refractive index modulation associated with the implantation of oxygen or silicon into waveguides formed in silicon-on-insulator (SOI) has been investigated to determine the feasibility of producing planar, implantation induced Bragg grating optical filters. A two-dimensional coupled mode theory...
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| Veröffentlicht in: | Advances in optical technologies 2008, Vol.2008 (1) |
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| container_title | Advances in optical technologies |
| container_volume | 2008 |
| creator | Bulk, M. P. Knights, A. P. Jessop, P. E. Waugh, P. Loiacono, R. Mashanovich, G. Z. Reed, G. T. Gwilliam, R. M. |
| description | The refractive index modulation associated with the implantation of oxygen or silicon into waveguides formed in silicon-on-insulator (SOI) has been investigated to determine the feasibility of producing planar, implantation induced Bragg grating optical filters. A two-dimensional coupled mode theory-based simulation suggests that relatively short grating lengths, on the order of a thousand microns, can exhibit sufficient wavelength suppression, of >10 dB, using the implantation technique. Fabricated planar implanted slab-guided SOI waveguides demonstrated an extinction of −10 dB for TE modes and −6 dB for TM modes for the case of oxygen implantation. Extinctions of −5 dB and −2 dB have been demonstrated with silicon implantation. |
| doi_str_mv | 10.1155/2008/276165 |
| format | Article |
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| source | Wiley Open Access; Alma/SFX Local Collection; EZB Electronic Journals Library |
| subjects | Colleges & universities Plasma etching Point defects R&D Research & development Silicon wafers Temperature Transplants & implants |
| title | Optical Filters Utilizing Ion Implanted Bragg Gratings in SOI Waveguides |
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