Enhancement in Conductivity and Transmittance of Zinc Oxide Prepared by Chemical Bath Deposition

Highly conductive and transparent zinc oxide thin films were prepared on cleaned Corning Eagle 2000 glass substrates by chemical bath deposition (CBD) using Zn(NO 3 ) 2 and (CH 3 ) 2 NHBH 3 ; the effects of annealing on the structural, electrical and optical properties were investigated. The electri...

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Veröffentlicht in:Journal of electronic materials 2009-11, Vol.38 (11), p.2264-2269
Hauptverfasser: Luo, Wei-Hsiang, Tsai, Ting-Kan, Yang, Jen-Chieh, Hsieh, Wei-Ming, Hsu, Chia-His, Fang, Jau-Shiung
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container_issue 11
container_start_page 2264
container_title Journal of electronic materials
container_volume 38
creator Luo, Wei-Hsiang
Tsai, Ting-Kan
Yang, Jen-Chieh
Hsieh, Wei-Ming
Hsu, Chia-His
Fang, Jau-Shiung
description Highly conductive and transparent zinc oxide thin films were prepared on cleaned Corning Eagle 2000 glass substrates by chemical bath deposition (CBD) using Zn(NO 3 ) 2 and (CH 3 ) 2 NHBH 3 ; the effects of annealing on the structural, electrical and optical properties were investigated. The electrical properties of the film were greatly affected by annealing. Structural characterization was performed by x-ray diffraction and field emission scanning electron micro- scopy. The thin film had a low resistivity of 2.9 × 10 −2 Ω cm, an average transmittance of 81.2%, and a bandgap of 3.23 eV (which is in the visible range) when the film was annealed at 600°C in Ar + H 2 . The results demonstrated that a low-resistivity and high-transmittance zinc oxide film can be prepared by CBD, which makes the process readily applicable for a roll-to-roll process.
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subjects Characterization and Evaluation of Materials
Chemistry and Materials Science
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Conductivity
Electronics and Microelectronics
Exact sciences and technology
Instrumentation
Materials Science
Optical and Electronic Materials
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of bulk materials and thin films
Physics
Solid State Physics
Zinc oxides
title Enhancement in Conductivity and Transmittance of Zinc Oxide Prepared by Chemical Bath Deposition
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