Enhancement in Conductivity and Transmittance of Zinc Oxide Prepared by Chemical Bath Deposition
Highly conductive and transparent zinc oxide thin films were prepared on cleaned Corning Eagle 2000 glass substrates by chemical bath deposition (CBD) using Zn(NO 3 ) 2 and (CH 3 ) 2 NHBH 3 ; the effects of annealing on the structural, electrical and optical properties were investigated. The electri...
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Veröffentlicht in: | Journal of electronic materials 2009-11, Vol.38 (11), p.2264-2269 |
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creator | Luo, Wei-Hsiang Tsai, Ting-Kan Yang, Jen-Chieh Hsieh, Wei-Ming Hsu, Chia-His Fang, Jau-Shiung |
description | Highly conductive and transparent zinc oxide thin films were prepared on cleaned Corning Eagle
2000
glass substrates by chemical bath deposition (CBD) using Zn(NO
3
)
2
and (CH
3
)
2
NHBH
3
; the effects of annealing on the structural, electrical and optical properties were investigated. The electrical properties of the film were greatly affected by annealing. Structural characterization was performed by x-ray diffraction and field emission scanning electron micro- scopy. The thin film had a low resistivity of 2.9 × 10
−2
Ω cm, an average transmittance of 81.2%, and a bandgap of 3.23 eV (which is in the visible range) when the film was annealed at 600°C in Ar + H
2
. The results demonstrated that a low-resistivity and high-transmittance zinc oxide film can be prepared by CBD, which makes the process readily applicable for a roll-to-roll process. |
doi_str_mv | 10.1007/s11664-009-0900-6 |
format | Article |
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2000
glass substrates by chemical bath deposition (CBD) using Zn(NO
3
)
2
and (CH
3
)
2
NHBH
3
; the effects of annealing on the structural, electrical and optical properties were investigated. The electrical properties of the film were greatly affected by annealing. Structural characterization was performed by x-ray diffraction and field emission scanning electron micro- scopy. The thin film had a low resistivity of 2.9 × 10
−2
Ω cm, an average transmittance of 81.2%, and a bandgap of 3.23 eV (which is in the visible range) when the film was annealed at 600°C in Ar + H
2
. The results demonstrated that a low-resistivity and high-transmittance zinc oxide film can be prepared by CBD, which makes the process readily applicable for a roll-to-roll process.</description><identifier>ISSN: 0361-5235</identifier><identifier>EISSN: 1543-186X</identifier><identifier>DOI: 10.1007/s11664-009-0900-6</identifier><identifier>CODEN: JECMA5</identifier><language>eng</language><publisher>Boston: Springer US</publisher><subject>Characterization and Evaluation of Materials ; Chemistry and Materials Science ; Condensed matter: electronic structure, electrical, magnetic, and optical properties ; Conductivity ; Electronics and Microelectronics ; Exact sciences and technology ; Instrumentation ; Materials Science ; Optical and Electronic Materials ; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation ; Optical properties of bulk materials and thin films ; Physics ; Solid State Physics ; Zinc oxides</subject><ispartof>Journal of electronic materials, 2009-11, Vol.38 (11), p.2264-2269</ispartof><rights>TMS 2009</rights><rights>2015 INIST-CNRS</rights><rights>Copyright Minerals, Metals & Materials Society Nov 2009</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c345t-e31c59dfcb70600393c058a89d9670da0bbd1581301c1372cc560d7b3aa01f6d3</citedby><cites>FETCH-LOGICAL-c345t-e31c59dfcb70600393c058a89d9670da0bbd1581301c1372cc560d7b3aa01f6d3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1007/s11664-009-0900-6$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1007/s11664-009-0900-6$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>309,310,314,776,780,785,786,23909,23910,25118,27901,27902,41464,42533,51294</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=22148929$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Luo, Wei-Hsiang</creatorcontrib><creatorcontrib>Tsai, Ting-Kan</creatorcontrib><creatorcontrib>Yang, Jen-Chieh</creatorcontrib><creatorcontrib>Hsieh, Wei-Ming</creatorcontrib><creatorcontrib>Hsu, Chia-His</creatorcontrib><creatorcontrib>Fang, Jau-Shiung</creatorcontrib><title>Enhancement in Conductivity and Transmittance of Zinc Oxide Prepared by Chemical Bath Deposition</title><title>Journal of electronic materials</title><addtitle>Journal of Elec Materi</addtitle><description>Highly conductive and transparent zinc oxide thin films were prepared on cleaned Corning Eagle
2000
glass substrates by chemical bath deposition (CBD) using Zn(NO
3
)
2
and (CH
3
)
2
NHBH
3
; the effects of annealing on the structural, electrical and optical properties were investigated. The electrical properties of the film were greatly affected by annealing. Structural characterization was performed by x-ray diffraction and field emission scanning electron micro- scopy. The thin film had a low resistivity of 2.9 × 10
−2
Ω cm, an average transmittance of 81.2%, and a bandgap of 3.23 eV (which is in the visible range) when the film was annealed at 600°C in Ar + H
2
. The results demonstrated that a low-resistivity and high-transmittance zinc oxide film can be prepared by CBD, which makes the process readily applicable for a roll-to-roll process.</description><subject>Characterization and Evaluation of Materials</subject><subject>Chemistry and Materials Science</subject><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties</subject><subject>Conductivity</subject><subject>Electronics and Microelectronics</subject><subject>Exact sciences and technology</subject><subject>Instrumentation</subject><subject>Materials Science</subject><subject>Optical and Electronic Materials</subject><subject>Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation</subject><subject>Optical properties of bulk materials and thin films</subject><subject>Physics</subject><subject>Solid State Physics</subject><subject>Zinc oxides</subject><issn>0361-5235</issn><issn>1543-186X</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2009</creationdate><recordtype>article</recordtype><sourceid>8G5</sourceid><sourceid>BENPR</sourceid><sourceid>GUQSH</sourceid><sourceid>M2O</sourceid><recordid>eNp1kE1LAzEQhoMoWD9-gLcgeFyd2Wyym6PWTxD0UEG8xGyStSk2W5NU7L93S0VPnuYwz7wz8xByhHCKAPVZQhSiKgBkARKgEFtkhLxiBTbieZuMgAkseMn4LtlLaQaAHBsckderMNXBuLkLmfpAx32wS5P9p88rqoOlk6hDmvuc1xTtO_rig6EPX946-hjdQkdnabui46mbe6Pf6YXOU3rpFn3y2ffhgOx0-j25w5-6T56urybj2-L-4eZufH5fGFbxXDiGhkvbmbYGAcAkM8Ab3UgrRQ1WQ9ta5A0yQIOsLo3hAmzdMq0BO2HZPjne5C5i_7F0KatZv4xhWKlqgVCjrKoBwg1kYp9SdJ1aRD_XcaUQ1Nqj2nhUg0e19qjEMHPyE6zT8F83-DA-_Q6WJVaNLOXAlRsuDa3w5uLfAf-HfwMTK4Ip</recordid><startdate>20091101</startdate><enddate>20091101</enddate><creator>Luo, Wei-Hsiang</creator><creator>Tsai, Ting-Kan</creator><creator>Yang, Jen-Chieh</creator><creator>Hsieh, Wei-Ming</creator><creator>Hsu, Chia-His</creator><creator>Fang, Jau-Shiung</creator><general>Springer US</general><general>Springer</general><general>Springer Nature B.V</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>3V.</scope><scope>7XB</scope><scope>88I</scope><scope>8AF</scope><scope>8AO</scope><scope>8FE</scope><scope>8FG</scope><scope>8FK</scope><scope>8G5</scope><scope>ABJCF</scope><scope>ABUWG</scope><scope>AFKRA</scope><scope>ARAPS</scope><scope>AZQEC</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>D1I</scope><scope>DWQXO</scope><scope>GNUQQ</scope><scope>GUQSH</scope><scope>HCIFZ</scope><scope>KB.</scope><scope>L6V</scope><scope>M2O</scope><scope>M2P</scope><scope>M7S</scope><scope>MBDVC</scope><scope>P5Z</scope><scope>P62</scope><scope>PDBOC</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope><scope>PTHSS</scope><scope>Q9U</scope><scope>S0X</scope></search><sort><creationdate>20091101</creationdate><title>Enhancement in Conductivity and Transmittance of Zinc Oxide Prepared by Chemical Bath Deposition</title><author>Luo, Wei-Hsiang ; Tsai, Ting-Kan ; Yang, Jen-Chieh ; Hsieh, Wei-Ming ; Hsu, Chia-His ; Fang, Jau-Shiung</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c345t-e31c59dfcb70600393c058a89d9670da0bbd1581301c1372cc560d7b3aa01f6d3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2009</creationdate><topic>Characterization and Evaluation of Materials</topic><topic>Chemistry and Materials Science</topic><topic>Condensed matter: electronic structure, electrical, magnetic, and optical properties</topic><topic>Conductivity</topic><topic>Electronics and Microelectronics</topic><topic>Exact sciences and technology</topic><topic>Instrumentation</topic><topic>Materials Science</topic><topic>Optical and Electronic Materials</topic><topic>Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation</topic><topic>Optical properties of bulk materials and thin films</topic><topic>Physics</topic><topic>Solid State Physics</topic><topic>Zinc oxides</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Luo, Wei-Hsiang</creatorcontrib><creatorcontrib>Tsai, Ting-Kan</creatorcontrib><creatorcontrib>Yang, Jen-Chieh</creatorcontrib><creatorcontrib>Hsieh, Wei-Ming</creatorcontrib><creatorcontrib>Hsu, Chia-His</creatorcontrib><creatorcontrib>Fang, Jau-Shiung</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>ProQuest Central (Corporate)</collection><collection>ProQuest Central (purchase pre-March 2016)</collection><collection>Science Database (Alumni Edition)</collection><collection>STEM Database</collection><collection>ProQuest Pharma Collection</collection><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>ProQuest Central (Alumni) (purchase pre-March 2016)</collection><collection>Research Library (Alumni Edition)</collection><collection>Materials Science & Engineering Collection</collection><collection>ProQuest Central (Alumni Edition)</collection><collection>ProQuest Central UK/Ireland</collection><collection>Advanced Technologies & Aerospace Collection</collection><collection>ProQuest Central Essentials</collection><collection>ProQuest Central</collection><collection>Technology Collection</collection><collection>ProQuest One Community College</collection><collection>ProQuest Materials Science Collection</collection><collection>ProQuest Central Korea</collection><collection>ProQuest Central Student</collection><collection>Research Library Prep</collection><collection>SciTech Premium Collection</collection><collection>Materials Science Database</collection><collection>ProQuest Engineering Collection</collection><collection>Research Library</collection><collection>Science Database</collection><collection>Engineering Database</collection><collection>Research Library (Corporate)</collection><collection>Advanced Technologies & Aerospace Database</collection><collection>ProQuest Advanced Technologies & Aerospace Collection</collection><collection>Materials Science Collection</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><collection>ProQuest Central China</collection><collection>Engineering Collection</collection><collection>ProQuest Central Basic</collection><collection>SIRS Editorial</collection><jtitle>Journal of electronic materials</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Luo, Wei-Hsiang</au><au>Tsai, Ting-Kan</au><au>Yang, Jen-Chieh</au><au>Hsieh, Wei-Ming</au><au>Hsu, Chia-His</au><au>Fang, Jau-Shiung</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Enhancement in Conductivity and Transmittance of Zinc Oxide Prepared by Chemical Bath Deposition</atitle><jtitle>Journal of electronic materials</jtitle><stitle>Journal of Elec Materi</stitle><date>2009-11-01</date><risdate>2009</risdate><volume>38</volume><issue>11</issue><spage>2264</spage><epage>2269</epage><pages>2264-2269</pages><issn>0361-5235</issn><eissn>1543-186X</eissn><coden>JECMA5</coden><abstract>Highly conductive and transparent zinc oxide thin films were prepared on cleaned Corning Eagle
2000
glass substrates by chemical bath deposition (CBD) using Zn(NO
3
)
2
and (CH
3
)
2
NHBH
3
; the effects of annealing on the structural, electrical and optical properties were investigated. The electrical properties of the film were greatly affected by annealing. Structural characterization was performed by x-ray diffraction and field emission scanning electron micro- scopy. The thin film had a low resistivity of 2.9 × 10
−2
Ω cm, an average transmittance of 81.2%, and a bandgap of 3.23 eV (which is in the visible range) when the film was annealed at 600°C in Ar + H
2
. The results demonstrated that a low-resistivity and high-transmittance zinc oxide film can be prepared by CBD, which makes the process readily applicable for a roll-to-roll process.</abstract><cop>Boston</cop><pub>Springer US</pub><doi>10.1007/s11664-009-0900-6</doi><tpages>6</tpages></addata></record> |
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subjects | Characterization and Evaluation of Materials Chemistry and Materials Science Condensed matter: electronic structure, electrical, magnetic, and optical properties Conductivity Electronics and Microelectronics Exact sciences and technology Instrumentation Materials Science Optical and Electronic Materials Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of bulk materials and thin films Physics Solid State Physics Zinc oxides |
title | Enhancement in Conductivity and Transmittance of Zinc Oxide Prepared by Chemical Bath Deposition |
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