Frequency Dependence of Ion Energy at the Outlet of a Capacitive RF Discharge Placed in an External Magnetic Field with a Predominant Radial Component
The frequency dependence of the energy and ion current at the output of an RF plasma source with SPT geometry has been investigated. It has been shown that the ion energy is maximum when operating at a frequency of 6.8 MHz. An increase in the operating frequency is accompanied by a decrease in ion e...
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| Veröffentlicht in: | Plasma physics reports 2024, Vol.50 (11), p.1448-1451 |
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| container_title | Plasma physics reports |
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| creator | Shvydkiy, G. V. Vavilin, K. V. Zadiriev, I. I. Kralkina, E. A. Nikonov, A. M. |
| description | The frequency dependence of the energy and ion current at the output of an RF plasma source with SPT geometry has been investigated. It has been shown that the ion energy is maximum when operating at a frequency of 6.8 MHz. An increase in the operating frequency is accompanied by a decrease in ion energy. The ion current depends nonmonotonically on frequency. At frequencies less than 27.12 MHz, an increase in the ion energy is accompanied by a decrease in the current, and a decrease in the energy by an increase in the current. Increasing the frequency to 27.12 MHz does not lead to an increase in the ion current
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| doi_str_mv | 10.1134/S1063780X24601883 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_journals_3154865641</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>3154865641</sourcerecordid><originalsourceid>FETCH-LOGICAL-c1133-b99b6fc280e690951d9cfbcf11052aae115295981ae9be89e952d2f98ad6782c3</originalsourceid><addsrcrecordid>eNp1kEFrGzEQhZeSQpO0P6C3gZw31WgtRToGJ24DKQlpA7ktY-2srbDWbiQ5rf9If29lXOih9DQD73uPmVdVH1GcIzazT99Q6ObCiCc50wKNad5Ux6i0rLVtzFHZi1zv9XfVSUrPQiAahcfVr0Xkly0Ht4Mrnjh0ZWUYe7gZA1wHjqsdUIa8Zrjb5oHzXiOY00TOZ__K8LCAK5_cmuKK4X4gxx34AFTsPzPHQAN8pVXg7B0sPA8d_PB5XTLuI3fjxgcKGR6o8wWcj5tpDBzy--ptT0PiD3_mafW4uP4-_1Lf3n2-mV_e1q583dRLa5e6d9II1lZYhZ11_dL1iEJJIkZU0iprkNgu2Vi2Snayt4Y6fWGka06rs0PuFMdSQ8rt87jd35zaBtXMaKVnWCg8UC6OKUXu2yn6DcVdi6Ld19_-U3_xyIMnFTasOP5N_r_pN5hrh3A</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>3154865641</pqid></control><display><type>article</type><title>Frequency Dependence of Ion Energy at the Outlet of a Capacitive RF Discharge Placed in an External Magnetic Field with a Predominant Radial Component</title><source>Springer Nature - Complete Springer Journals</source><creator>Shvydkiy, G. V. ; Vavilin, K. V. ; Zadiriev, I. I. ; Kralkina, E. A. ; Nikonov, A. M.</creator><creatorcontrib>Shvydkiy, G. V. ; Vavilin, K. V. ; Zadiriev, I. I. ; Kralkina, E. A. ; Nikonov, A. M.</creatorcontrib><description>The frequency dependence of the energy and ion current at the output of an RF plasma source with SPT geometry has been investigated. It has been shown that the ion energy is maximum when operating at a frequency of 6.8 MHz. An increase in the operating frequency is accompanied by a decrease in ion energy. The ion current depends nonmonotonically on frequency. At frequencies less than 27.12 MHz, an increase in the ion energy is accompanied by a decrease in the current, and a decrease in the energy by an increase in the current. Increasing the frequency to 27.12 MHz does not lead to an increase in the ion current
.</description><identifier>ISSN: 1063-780X</identifier><identifier>EISSN: 1562-6938</identifier><identifier>DOI: 10.1134/S1063780X24601883</identifier><language>eng</language><publisher>Moscow: Pleiades Publishing</publisher><subject>Applied Physics ; Atomic ; Ion currents ; Molecular ; Optical and Plasma Physics ; Physics ; Physics and Astronomy ; Radio frequency</subject><ispartof>Plasma physics reports, 2024, Vol.50 (11), p.1448-1451</ispartof><rights>Pleiades Publishing, Ltd. 2024 ISSN 1063-780X, Plasma Physics Reports, 2024, Vol. 50, No. 11, pp. 1448–1451. © Pleiades Publishing, Ltd., 2024.Russian Text © The Author(s), 2024, published in Prikladnaya Fizika, 2024, No. 4, pp. 14–19.</rights><rights>Copyright Springer Nature B.V. 2024</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c1133-b99b6fc280e690951d9cfbcf11052aae115295981ae9be89e952d2f98ad6782c3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1134/S1063780X24601883$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1134/S1063780X24601883$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,777,781,27905,27906,41469,42538,51300</link.rule.ids></links><search><creatorcontrib>Shvydkiy, G. V.</creatorcontrib><creatorcontrib>Vavilin, K. V.</creatorcontrib><creatorcontrib>Zadiriev, I. I.</creatorcontrib><creatorcontrib>Kralkina, E. A.</creatorcontrib><creatorcontrib>Nikonov, A. M.</creatorcontrib><title>Frequency Dependence of Ion Energy at the Outlet of a Capacitive RF Discharge Placed in an External Magnetic Field with a Predominant Radial Component</title><title>Plasma physics reports</title><addtitle>Plasma Phys. Rep</addtitle><description>The frequency dependence of the energy and ion current at the output of an RF plasma source with SPT geometry has been investigated. It has been shown that the ion energy is maximum when operating at a frequency of 6.8 MHz. An increase in the operating frequency is accompanied by a decrease in ion energy. The ion current depends nonmonotonically on frequency. At frequencies less than 27.12 MHz, an increase in the ion energy is accompanied by a decrease in the current, and a decrease in the energy by an increase in the current. Increasing the frequency to 27.12 MHz does not lead to an increase in the ion current
.</description><subject>Applied Physics</subject><subject>Atomic</subject><subject>Ion currents</subject><subject>Molecular</subject><subject>Optical and Plasma Physics</subject><subject>Physics</subject><subject>Physics and Astronomy</subject><subject>Radio frequency</subject><issn>1063-780X</issn><issn>1562-6938</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2024</creationdate><recordtype>article</recordtype><recordid>eNp1kEFrGzEQhZeSQpO0P6C3gZw31WgtRToGJ24DKQlpA7ktY-2srbDWbiQ5rf9If29lXOih9DQD73uPmVdVH1GcIzazT99Q6ObCiCc50wKNad5Ux6i0rLVtzFHZi1zv9XfVSUrPQiAahcfVr0Xkly0Ht4Mrnjh0ZWUYe7gZA1wHjqsdUIa8Zrjb5oHzXiOY00TOZ__K8LCAK5_cmuKK4X4gxx34AFTsPzPHQAN8pVXg7B0sPA8d_PB5XTLuI3fjxgcKGR6o8wWcj5tpDBzy--ptT0PiD3_mafW4uP4-_1Lf3n2-mV_e1q583dRLa5e6d9II1lZYhZ11_dL1iEJJIkZU0iprkNgu2Vi2Snayt4Y6fWGka06rs0PuFMdSQ8rt87jd35zaBtXMaKVnWCg8UC6OKUXu2yn6DcVdi6Ld19_-U3_xyIMnFTasOP5N_r_pN5hrh3A</recordid><startdate>2024</startdate><enddate>2024</enddate><creator>Shvydkiy, G. V.</creator><creator>Vavilin, K. V.</creator><creator>Zadiriev, I. I.</creator><creator>Kralkina, E. A.</creator><creator>Nikonov, A. M.</creator><general>Pleiades Publishing</general><general>Springer Nature B.V</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>2024</creationdate><title>Frequency Dependence of Ion Energy at the Outlet of a Capacitive RF Discharge Placed in an External Magnetic Field with a Predominant Radial Component</title><author>Shvydkiy, G. V. ; Vavilin, K. V. ; Zadiriev, I. I. ; Kralkina, E. A. ; Nikonov, A. M.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c1133-b99b6fc280e690951d9cfbcf11052aae115295981ae9be89e952d2f98ad6782c3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2024</creationdate><topic>Applied Physics</topic><topic>Atomic</topic><topic>Ion currents</topic><topic>Molecular</topic><topic>Optical and Plasma Physics</topic><topic>Physics</topic><topic>Physics and Astronomy</topic><topic>Radio frequency</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Shvydkiy, G. V.</creatorcontrib><creatorcontrib>Vavilin, K. V.</creatorcontrib><creatorcontrib>Zadiriev, I. I.</creatorcontrib><creatorcontrib>Kralkina, E. A.</creatorcontrib><creatorcontrib>Nikonov, A. M.</creatorcontrib><collection>CrossRef</collection><jtitle>Plasma physics reports</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Shvydkiy, G. V.</au><au>Vavilin, K. V.</au><au>Zadiriev, I. I.</au><au>Kralkina, E. A.</au><au>Nikonov, A. M.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Frequency Dependence of Ion Energy at the Outlet of a Capacitive RF Discharge Placed in an External Magnetic Field with a Predominant Radial Component</atitle><jtitle>Plasma physics reports</jtitle><stitle>Plasma Phys. Rep</stitle><date>2024</date><risdate>2024</risdate><volume>50</volume><issue>11</issue><spage>1448</spage><epage>1451</epage><pages>1448-1451</pages><issn>1063-780X</issn><eissn>1562-6938</eissn><abstract>The frequency dependence of the energy and ion current at the output of an RF plasma source with SPT geometry has been investigated. It has been shown that the ion energy is maximum when operating at a frequency of 6.8 MHz. An increase in the operating frequency is accompanied by a decrease in ion energy. The ion current depends nonmonotonically on frequency. At frequencies less than 27.12 MHz, an increase in the ion energy is accompanied by a decrease in the current, and a decrease in the energy by an increase in the current. Increasing the frequency to 27.12 MHz does not lead to an increase in the ion current
.</abstract><cop>Moscow</cop><pub>Pleiades Publishing</pub><doi>10.1134/S1063780X24601883</doi><tpages>4</tpages></addata></record> |
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| source | Springer Nature - Complete Springer Journals |
| subjects | Applied Physics Atomic Ion currents Molecular Optical and Plasma Physics Physics Physics and Astronomy Radio frequency |
| title | Frequency Dependence of Ion Energy at the Outlet of a Capacitive RF Discharge Placed in an External Magnetic Field with a Predominant Radial Component |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-19T20%3A38%3A02IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Frequency%20Dependence%20of%20Ion%20Energy%20at%20the%20Outlet%20of%20a%20Capacitive%20RF%20Discharge%20Placed%20in%20an%20External%20Magnetic%20Field%20with%20a%20Predominant%20Radial%20Component&rft.jtitle=Plasma%20physics%20reports&rft.au=Shvydkiy,%20G.%20V.&rft.date=2024&rft.volume=50&rft.issue=11&rft.spage=1448&rft.epage=1451&rft.pages=1448-1451&rft.issn=1063-780X&rft.eissn=1562-6938&rft_id=info:doi/10.1134/S1063780X24601883&rft_dat=%3Cproquest_cross%3E3154865641%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=3154865641&rft_id=info:pmid/&rfr_iscdi=true |