Optical properties of unoxidized and oxidized titanium nitride thin films

This study reports a pulsed laser deposition-assisted synthesis of highly metallic titanium nitride (TiN) and a series of semiconducting titanium oxynitride (TiN x O y ) compounds in thin film form with tunable plasmonic properties by carefully altering the nitrogen (N)-oxygen (O) ratio. The N/O rat...

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Veröffentlicht in:	International journal of mechanical and materials engineering 2025-01, Vol.20 (1), p.2, Article 2
Hauptverfasser:	Odusanya, Abiodun A., Schall, J. David, Pfeifer, Mark A., Wright, John, Martin, Catalin, Craciun, Valentin, Kumar, Dhananjay
Format:	Artikel
Sprache:	eng
Schlagworte:	Analysis Dielectric films Doping Electric properties Engineering External pressure Film growth High vacuum Infrared spectra Mechanical Engineering Near infrared radiation Nitrides Nitrogen Noble metals Optical properties Original Paper Oxidation Oxygen Photoelectrons Plasmonics Pressure dependence Pulsed laser deposition Pulsed lasers Reflectance Silver Structural Materials Theoretical and Applied Mechanics Thin films Titanium Titanium nitride Vapor phases X ray photoelectron spectroscopy X-ray spectroscopy
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