Optimization of Ti2O3 thin films by magnetron sputtering and study of their photoelectric performance

In this study, Ti2O3 thin films were successfully produced using magnetron sputtering. Through orthogonal gradient experiments, the impact of substrate temperature, sputtering vacuum, RF power, and sputtering duration on surface morphology, roughness, physical structure, and resistivity was investig...

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Veröffentlicht in:International journal of applied ceramic technology 2025-01, Vol.22 (1), p.n/a
Hauptverfasser: Wang, Wenwei, He, Jialiang, Yao, Yingbang
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description In this study, Ti2O3 thin films were successfully produced using magnetron sputtering. Through orthogonal gradient experiments, the impact of substrate temperature, sputtering vacuum, RF power, and sputtering duration on surface morphology, roughness, physical structure, and resistivity was investigated. Various analytical techniques were employed, including AFM and SEM for surface morphology observation, XRD and Raman for qualitative physical structure analysis, XPS for elemental valence examination, and the four‐probe method for resistivity measurements. The study identified optimal growth conditions for Ti2O3 films, demonstrating a low resistivity of 2.66 × 10−3 Ω cm under the following conditions: RF power of 200 W, sputtering vacuum of .6 Pa, substrate temperature of 600°C, and sputtering duration of 60 min. Additionally, the sensor arrays were efficiently fabricated using the Lift‐off method to evaluate the photoelectric performance of the films. A light responsiveness of approximately 6 µA/W was observed in the device when illuminated with 950 nm light for 10 s. This finding carries important implications for the use of Ti2O3 thin films in future photoelectric devices.
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subjects Electrical resistivity
Light
Magnetron sputtering
Morphology
Performance evaluation
photoelectric performance
Photoelectricity
Qualitative analysis
resistivity
Sensor arrays
Structural analysis
Thin films
Ti2O3 thin films
Titanium oxides
X ray photoelectron spectroscopy
title Optimization of Ti2O3 thin films by magnetron sputtering and study of their photoelectric performance
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