A Method for Fabricating CMOS Back-End-of-Line-Compatible Solid-State Nanopore Devices

Solid-state nanopores, nm-sized holes in thin, freestanding membranes, are powerful single-molecule sensors capable of interrogating a wide range of target analytes, from small molecules to large polymers. Interestingly, due to their high spatial resolution, nanopores can also identify tags on long...

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Veröffentlicht in:	arXiv.org 2024-11
Hauptverfasser:	Mohamed Yassine Bouhamidi, Dai, Chunhui, Michel, Stephan, Nag, Joyeeta, Kinney, Justin, Wan, Lei, Waugh, Matthew, Briggs, Kyle, Jordan Katine, Tabard-Cossa, Vincent, Bedau, Daniel
Format:	Artikel
Sprache:	eng
Schlagworte:	CMOS Electrical properties Information storage Low pressure Membranes Noise generation Polymers Signal processing Solid state Spatial resolution Vapor deposition
Online-Zugang:	Volltext
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