Research and application of TiO2/AZO bilayer electron transport structure

TiO 2 films prepared by magnetron sputtering are investigated for their passivation effect on silicon wafers, along with the influence of post-annealing treatment on the passivation properties of TiO 2 films. Considering TiO 2 as an excellent electron transport material, this research explores the impact of thickness and post-annealing treatment on solar cells utilizing TiO 2 as an electron transport layer (ETL). Furthermore, a TiO 2 /AZO bilayer electron transport layer is proposed and fabricated, enhancing carrier transport and extraction, thereby increasing the power conversion efficiency (PCE) of solar cells from 11.26% with TiO 2 alone as the ETL to 13.96% with the TiO 2 /AZO bilayer ETL. The band structure is also analyzed to further investigate the internal carrier transport mechanism of the bilayer ETL.