A Simulation Study on the Effect of Filament Spacing on the Temperature Field Uniformity of an HFCVD System

Hot-filament chemical vapor deposition (HFCVD) has become the most widely used ways of preparing diamond film-coated tools due to the simple equipment used, its convenient operation, and its low cost. In the production process of an actual factory, a large number of coated tools need to be prepared...

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Veröffentlicht in:	Coatings (Basel) 2024-10, Vol.14 (10), p.1266
Hauptverfasser:	Hao, Cen, Deng, Fuming, Du, Quanbin, Min, Zhiyu, Lei, Qing, Wang, Lei, Zhang, Liang
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical vapor deposition Computational fluid dynamics Design Diamond films Diamond tools Filaments Finite volume method Fluid dynamics Heat transfer Industrial production Plant layout Radiation Simulation Software Substrates Temperature Temperature distribution
Online-Zugang:	Volltext
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