Surface error effect on reflectivity and focused spot of an EUV tubular mirror machined by ultra-precision diamond turning

Grazing-incidence tubular mirrors, which provide high reflectivity and significant demagnification of the meridian and sagittal plane through a single reflection, are important optical elements in extreme ultraviolet (EUV) focusing systems. Surface errors induced by the manufacturing process have a...

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Veröffentlicht in:	Applied optics (2004) 2024-09, Vol.63 (25), p.6560
Hauptverfasser:	Wu, Shan, Wang, Jinshi, Cui, Huaiyu, Zhao, Yongpeng, Fang, Fengzhou
Format:	Artikel
Sprache:	eng
Schlagworte:	Diamond machining Error analysis Focusing Frequency ranges Optical components Perturbation theory Ray tracing Reflectance Surface geometry Ultraviolet reflection
Online-Zugang:	Volltext
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