Electron Microscopy of the Microstructure of Antimony Thin Films of Variable Thickness

Thin Sb films with a thickness gradient deposited in vacuum were investigated by transmission electron microscopy. Microstructures in films with increasing thickness change from amorphous islands of increasing density and size to labyrinthine and continuous films with texturing, which also changes w...

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Veröffentlicht in:Technical physics 2024, Vol.69 (3), p.586-591
Hauptverfasser: Kolosov, V. Yu, Yushkov, A. A., Veretennikov, L. M, Bokuniaeva, A. O.
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Sprache:eng
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Zusammenfassung:Thin Sb films with a thickness gradient deposited in vacuum were investigated by transmission electron microscopy. Microstructures in films with increasing thickness change from amorphous islands of increasing density and size to labyrinthine and continuous films with texturing, which also changes with increasing thickness. Based on the analysis of the patterns of bend extinction contours, a strong internal bending of the crystal lattice, up to 120 deg/µm, and the dependence of the crystallographic orientations in the structures of the film on the thickness were revealed.
ISSN:1063-7842
1090-6525
DOI:10.1134/S1063784224020178