Thermal stability and phase transformation of α-, κ(ε)-, and γ-Ga2O3 films under different ambient conditions

Phase transitions in metastable α-, κ(ε)-, and γ-Ga2O3 films to thermodynamically stable β-Ga2O3 during annealing in air, N2, and vacuum have been systematically investigated via in situ high-temperature x-ray diffraction (HT-XRD) and scanning electron microscopy (SEM). These respective polymorphs e...

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Veröffentlicht in:	Applied physics letters 2024-08, Vol.125 (9)
Hauptverfasser:	Tang, Jingyu, Jiang, Kunyao, Tseng, Po-Sen, Kurchin, Rachel C., Porter, Lisa M., Davis, Robert F.
Format:	Artikel
Sprache:	eng
Schlagworte:	Crystallography Damage Gallium oxides High temperature Orientation relationships Phase transitions Thermal stability Thermal transformations
Online-Zugang:	Volltext
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