Investigation of Optical Properties of Complex Cr-Based Hard Coatings Deposited through Unbalanced Magnetron Sputtering Intended for Real Industrial Applications
A preliminary investigation of the optical properties of complex Cr-based hard coatings and their connection with the compound structure of the coatings is presented. Cr/CrN, Cr/CrN/CrAlN, Cr/CrN/CrTiAlN, and Cr/CrN/CrAlTiN coating structures were deposited through unbalanced magnetron sputtering. T...
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| Veröffentlicht in: | Coatings (Basel) 2024-08, Vol.14 (8), p.946 |
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| creator | Chitanov, Vasiliy Kolaklieva, Lilyana Kakanakov, Roumen Cholakova, Tetiana Pashinski, Chavdar Kolchev, Stefan Zlatareva, Ekaterina Atanasova, Genoveva Tsanev, Alexander Hingerl, Kurt |
| description | A preliminary investigation of the optical properties of complex Cr-based hard coatings and their connection with the compound structure of the coatings is presented. Cr/CrN, Cr/CrN/CrAlN, Cr/CrN/CrTiAlN, and Cr/CrN/CrAlTiN coating structures were deposited through unbalanced magnetron sputtering. Their mechanical properties, especially nanohardness, coefficient of friction, and adhesion, were measured. The structure and composition of the coatings were characterised through SEM, FIB, XPS, and TEM. Their optical properties were investigated by UV-VIS ellipsometry. The optical parameters’ phase difference Δ, the amplitude ratio Ψ, the frequency-dependent real (ε1(ω)) and imaginary (ε2(ω)) part of the dielectric function, and the corresponding refractive and extinction indexes n(ω) and k(ω) were measured and modelled via regression analysis implemented using the WVASE© software version 3.686. Satisfactory coincidence was achieved between the measured optical data and the corresponding fitting models. The physical polycrystalline optical constants of the industrial samples were extracted from modelling data with roughness. The analysis of the data showed that ellipsometric characterisation can be used in order to determine the physical properties of Cr-based hard coatings with complex structure and composition, as well as for repeatability control of the deposition process. However, more detailed research is needed to predict the composition based on measured optical properties. |
| doi_str_mv | 10.3390/coatings14080946 |
| format | Article |
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Cr/CrN, Cr/CrN/CrAlN, Cr/CrN/CrTiAlN, and Cr/CrN/CrAlTiN coating structures were deposited through unbalanced magnetron sputtering. Their mechanical properties, especially nanohardness, coefficient of friction, and adhesion, were measured. The structure and composition of the coatings were characterised through SEM, FIB, XPS, and TEM. Their optical properties were investigated by UV-VIS ellipsometry. The optical parameters’ phase difference Δ, the amplitude ratio Ψ, the frequency-dependent real (ε1(ω)) and imaginary (ε2(ω)) part of the dielectric function, and the corresponding refractive and extinction indexes n(ω) and k(ω) were measured and modelled via regression analysis implemented using the WVASE© software version 3.686. Satisfactory coincidence was achieved between the measured optical data and the corresponding fitting models. The physical polycrystalline optical constants of the industrial samples were extracted from modelling data with roughness. The analysis of the data showed that ellipsometric characterisation can be used in order to determine the physical properties of Cr-based hard coatings with complex structure and composition, as well as for repeatability control of the deposition process. However, more detailed research is needed to predict the composition based on measured optical properties.</description><identifier>ISSN: 2079-6412</identifier><identifier>EISSN: 2079-6412</identifier><identifier>DOI: 10.3390/coatings14080946</identifier><language>eng</language><publisher>Basel: MDPI AG</publisher><subject>Chromium nitride ; Coatings ; Coefficient of friction ; Composition ; Data analysis ; Ellipsometry ; Industrial applications ; Investigations ; Magnetic properties ; Magnetron sputtering ; Mechanical properties ; Metal forming ; Nanohardness ; Nitrogen ; Optical data processing ; Optical properties ; Physical properties ; Plasma ; Regression analysis ; Software ; Spectrum analysis ; Structural analysis ; Temperature ; Thin films ; X ray photoelectron spectroscopy</subject><ispartof>Coatings (Basel), 2024-08, Vol.14 (8), p.946</ispartof><rights>COPYRIGHT 2024 MDPI AG</rights><rights>2024 by the authors. Licensee MDPI, Basel, Switzerland. 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Cr/CrN, Cr/CrN/CrAlN, Cr/CrN/CrTiAlN, and Cr/CrN/CrAlTiN coating structures were deposited through unbalanced magnetron sputtering. Their mechanical properties, especially nanohardness, coefficient of friction, and adhesion, were measured. The structure and composition of the coatings were characterised through SEM, FIB, XPS, and TEM. Their optical properties were investigated by UV-VIS ellipsometry. The optical parameters’ phase difference Δ, the amplitude ratio Ψ, the frequency-dependent real (ε1(ω)) and imaginary (ε2(ω)) part of the dielectric function, and the corresponding refractive and extinction indexes n(ω) and k(ω) were measured and modelled via regression analysis implemented using the WVASE© software version 3.686. Satisfactory coincidence was achieved between the measured optical data and the corresponding fitting models. The physical polycrystalline optical constants of the industrial samples were extracted from modelling data with roughness. The analysis of the data showed that ellipsometric characterisation can be used in order to determine the physical properties of Cr-based hard coatings with complex structure and composition, as well as for repeatability control of the deposition process. 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Kolaklieva, Lilyana ; Kakanakov, Roumen ; Cholakova, Tetiana ; Pashinski, Chavdar ; Kolchev, Stefan ; Zlatareva, Ekaterina ; Atanasova, Genoveva ; Tsanev, Alexander ; Hingerl, Kurt</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c235t-9c418fdbcbe0d0cd8c97065613fc6150e27296c4416ebf4574f112dce75719903</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2024</creationdate><topic>Chromium nitride</topic><topic>Coatings</topic><topic>Coefficient of friction</topic><topic>Composition</topic><topic>Data analysis</topic><topic>Ellipsometry</topic><topic>Industrial applications</topic><topic>Investigations</topic><topic>Magnetic properties</topic><topic>Magnetron sputtering</topic><topic>Mechanical properties</topic><topic>Metal forming</topic><topic>Nanohardness</topic><topic>Nitrogen</topic><topic>Optical data processing</topic><topic>Optical properties</topic><topic>Physical properties</topic><topic>Plasma</topic><topic>Regression analysis</topic><topic>Software</topic><topic>Spectrum analysis</topic><topic>Structural analysis</topic><topic>Temperature</topic><topic>Thin films</topic><topic>X ray photoelectron spectroscopy</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Chitanov, Vasiliy</creatorcontrib><creatorcontrib>Kolaklieva, Lilyana</creatorcontrib><creatorcontrib>Kakanakov, Roumen</creatorcontrib><creatorcontrib>Cholakova, Tetiana</creatorcontrib><creatorcontrib>Pashinski, Chavdar</creatorcontrib><creatorcontrib>Kolchev, Stefan</creatorcontrib><creatorcontrib>Zlatareva, Ekaterina</creatorcontrib><creatorcontrib>Atanasova, Genoveva</creatorcontrib><creatorcontrib>Tsanev, Alexander</creatorcontrib><creatorcontrib>Hingerl, Kurt</creatorcontrib><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>Materials Science & Engineering Collection</collection><collection>ProQuest Central (Alumni Edition)</collection><collection>ProQuest Central UK/Ireland</collection><collection>ProQuest Central Essentials</collection><collection>ProQuest Central</collection><collection>Technology Collection</collection><collection>ProQuest One Community College</collection><collection>ProQuest Materials Science Collection</collection><collection>ProQuest Central Korea</collection><collection>SciTech Premium Collection</collection><collection>Materials Research Database</collection><collection>Materials Science Database</collection><collection>Materials Science Collection</collection><collection>Publicly Available Content Database</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><collection>ProQuest Central China</collection><jtitle>Coatings (Basel)</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Chitanov, Vasiliy</au><au>Kolaklieva, Lilyana</au><au>Kakanakov, Roumen</au><au>Cholakova, Tetiana</au><au>Pashinski, Chavdar</au><au>Kolchev, Stefan</au><au>Zlatareva, Ekaterina</au><au>Atanasova, Genoveva</au><au>Tsanev, Alexander</au><au>Hingerl, Kurt</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Investigation of Optical Properties of Complex Cr-Based Hard Coatings Deposited through Unbalanced Magnetron Sputtering Intended for Real Industrial Applications</atitle><jtitle>Coatings (Basel)</jtitle><date>2024-08-01</date><risdate>2024</risdate><volume>14</volume><issue>8</issue><spage>946</spage><pages>946-</pages><issn>2079-6412</issn><eissn>2079-6412</eissn><abstract>A preliminary investigation of the optical properties of complex Cr-based hard coatings and their connection with the compound structure of the coatings is presented. Cr/CrN, Cr/CrN/CrAlN, Cr/CrN/CrTiAlN, and Cr/CrN/CrAlTiN coating structures were deposited through unbalanced magnetron sputtering. Their mechanical properties, especially nanohardness, coefficient of friction, and adhesion, were measured. The structure and composition of the coatings were characterised through SEM, FIB, XPS, and TEM. Their optical properties were investigated by UV-VIS ellipsometry. The optical parameters’ phase difference Δ, the amplitude ratio Ψ, the frequency-dependent real (ε1(ω)) and imaginary (ε2(ω)) part of the dielectric function, and the corresponding refractive and extinction indexes n(ω) and k(ω) were measured and modelled via regression analysis implemented using the WVASE© software version 3.686. Satisfactory coincidence was achieved between the measured optical data and the corresponding fitting models. The physical polycrystalline optical constants of the industrial samples were extracted from modelling data with roughness. The analysis of the data showed that ellipsometric characterisation can be used in order to determine the physical properties of Cr-based hard coatings with complex structure and composition, as well as for repeatability control of the deposition process. However, more detailed research is needed to predict the composition based on measured optical properties.</abstract><cop>Basel</cop><pub>MDPI AG</pub><doi>10.3390/coatings14080946</doi><orcidid>https://orcid.org/0000-0001-9929-2944</orcidid><orcidid>https://orcid.org/0000-0003-0595-5669</orcidid><orcidid>https://orcid.org/0000-0003-1895-3224</orcidid><orcidid>https://orcid.org/0000-0002-4583-8216</orcidid><oa>free_for_read</oa></addata></record> |
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| subjects | Chromium nitride Coatings Coefficient of friction Composition Data analysis Ellipsometry Industrial applications Investigations Magnetic properties Magnetron sputtering Mechanical properties Metal forming Nanohardness Nitrogen Optical data processing Optical properties Physical properties Plasma Regression analysis Software Spectrum analysis Structural analysis Temperature Thin films X ray photoelectron spectroscopy |
| title | Investigation of Optical Properties of Complex Cr-Based Hard Coatings Deposited through Unbalanced Magnetron Sputtering Intended for Real Industrial Applications |
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