Effect of Cluster Ion Bombardment on the Roughly Polished Surface of Single-Crystal Germanium Wafers
The surface treatment of single-crystal germanium with an argon cluster ion beam has been investigated. The original surface of the germanium wafers was bombarded with argon cluster ions with high (105 eV/atom) and low (10 eV/atom) specific energies. Using an atomic force microscope, images were obt...
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| Veröffentlicht in: | Moscow University physics bulletin 2024-06, Vol.79 (3), p.330-335 |
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| creator | Nikolaev, I. V. Korobeishchikov, N. G. Lapega, A. V. |
| description | The surface treatment of single-crystal germanium with an argon cluster ion beam has been investigated. The original surface of the germanium wafers was bombarded with argon cluster ions with high (105 eV/atom) and low (10 eV/atom) specific energies. Using an atomic force microscope, images were obtained and a comparison of the surface topography before and after cluster ion bombardment was conducted. The smoothing of the surface was demonstrated using the power spectral density function of roughness in the range of spatial frequencies: 1)
m
—for the high-energy mode; 2)
m
—for the low-energy mode. |
| doi_str_mv | 10.3103/S0027134924700462 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_journals_3093574936</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>3093574936</sourcerecordid><originalsourceid>FETCH-LOGICAL-c268t-9e821802a901abd576a845996ff5c0888e070afbeeed17a72fecb99a3ca5d4373</originalsourceid><addsrcrecordid>eNp1kE9Lw0AUxBdRsFY_gLcFz9G3f5LsHjVoLRQUq3gMm-Rtm5Jk625y6Lc3oYIH8fQOM7-ZxxByzeBWMBB3awCeMiE1lymATPgJmTEtZKRkAqdkNsnRpJ-TixB2AHHChZ6R6tFaLHvqLM2aIfTo6dJ19MG1hfFVi90odbTfIn1zw2bbHOira-qwxYquB29NiRO6rrtNg1HmD6E3DV2gb01XDy39NBZ9uCRn1jQBr37unHw8Pb5nz9HqZbHM7ldRyRPVRxoVZwq40cBMUcVpYpSMtU6sjUtQSiGkYGyBiBVLTcrHzwutjShNXEmRijm5OebuvfsaMPT5zg2-GytzAVrEqdQiGV3s6Cq9C8Gjzfe-bo0_5Azyacz8z5gjw49MGL3dBv1v8v_QN6rCdiA</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>3093574936</pqid></control><display><type>article</type><title>Effect of Cluster Ion Bombardment on the Roughly Polished Surface of Single-Crystal Germanium Wafers</title><source>Springer Nature - Complete Springer Journals</source><creator>Nikolaev, I. V. ; Korobeishchikov, N. G. ; Lapega, A. V.</creator><creatorcontrib>Nikolaev, I. V. ; Korobeishchikov, N. G. ; Lapega, A. V.</creatorcontrib><description>The surface treatment of single-crystal germanium with an argon cluster ion beam has been investigated. The original surface of the germanium wafers was bombarded with argon cluster ions with high (105 eV/atom) and low (10 eV/atom) specific energies. Using an atomic force microscope, images were obtained and a comparison of the surface topography before and after cluster ion bombardment was conducted. The smoothing of the surface was demonstrated using the power spectral density function of roughness in the range of spatial frequencies: 1)
m
—for the high-energy mode; 2)
m
—for the low-energy mode.</description><identifier>ISSN: 0027-1349</identifier><identifier>EISSN: 1934-8460</identifier><identifier>DOI: 10.3103/S0027134924700462</identifier><language>eng</language><publisher>Moscow: Pleiades Publishing</publisher><subject>Acoustics ; Argon ; Clusters ; Electronics ; Germanium ; Ion beams ; Ion bombardment ; Mathematical and Computational Physics ; Physics ; Physics and Astronomy ; Power spectral density ; Radiophysics ; Single crystals ; Spatial smoothing ; Spectral density function ; Surface treatment ; Theoretical ; Wafers</subject><ispartof>Moscow University physics bulletin, 2024-06, Vol.79 (3), p.330-335</ispartof><rights>Allerton Press, Inc. 2024. ISSN 0027-1349, Moscow University Physics Bulletin, 2024, Vol. 79, No. 3, pp. 330–335. © Allerton Press, Inc., 2024.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c268t-9e821802a901abd576a845996ff5c0888e070afbeeed17a72fecb99a3ca5d4373</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.3103/S0027134924700462$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.3103/S0027134924700462$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,776,780,27901,27902,41464,42533,51294</link.rule.ids></links><search><creatorcontrib>Nikolaev, I. V.</creatorcontrib><creatorcontrib>Korobeishchikov, N. G.</creatorcontrib><creatorcontrib>Lapega, A. V.</creatorcontrib><title>Effect of Cluster Ion Bombardment on the Roughly Polished Surface of Single-Crystal Germanium Wafers</title><title>Moscow University physics bulletin</title><addtitle>Moscow Univ. Phys</addtitle><description>The surface treatment of single-crystal germanium with an argon cluster ion beam has been investigated. The original surface of the germanium wafers was bombarded with argon cluster ions with high (105 eV/atom) and low (10 eV/atom) specific energies. Using an atomic force microscope, images were obtained and a comparison of the surface topography before and after cluster ion bombardment was conducted. The smoothing of the surface was demonstrated using the power spectral density function of roughness in the range of spatial frequencies: 1)
m
—for the high-energy mode; 2)
m
—for the low-energy mode.</description><subject>Acoustics</subject><subject>Argon</subject><subject>Clusters</subject><subject>Electronics</subject><subject>Germanium</subject><subject>Ion beams</subject><subject>Ion bombardment</subject><subject>Mathematical and Computational Physics</subject><subject>Physics</subject><subject>Physics and Astronomy</subject><subject>Power spectral density</subject><subject>Radiophysics</subject><subject>Single crystals</subject><subject>Spatial smoothing</subject><subject>Spectral density function</subject><subject>Surface treatment</subject><subject>Theoretical</subject><subject>Wafers</subject><issn>0027-1349</issn><issn>1934-8460</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2024</creationdate><recordtype>article</recordtype><recordid>eNp1kE9Lw0AUxBdRsFY_gLcFz9G3f5LsHjVoLRQUq3gMm-Rtm5Jk625y6Lc3oYIH8fQOM7-ZxxByzeBWMBB3awCeMiE1lymATPgJmTEtZKRkAqdkNsnRpJ-TixB2AHHChZ6R6tFaLHvqLM2aIfTo6dJ19MG1hfFVi90odbTfIn1zw2bbHOira-qwxYquB29NiRO6rrtNg1HmD6E3DV2gb01XDy39NBZ9uCRn1jQBr37unHw8Pb5nz9HqZbHM7ldRyRPVRxoVZwq40cBMUcVpYpSMtU6sjUtQSiGkYGyBiBVLTcrHzwutjShNXEmRijm5OebuvfsaMPT5zg2-GytzAVrEqdQiGV3s6Cq9C8Gjzfe-bo0_5Azyacz8z5gjw49MGL3dBv1v8v_QN6rCdiA</recordid><startdate>20240601</startdate><enddate>20240601</enddate><creator>Nikolaev, I. V.</creator><creator>Korobeishchikov, N. G.</creator><creator>Lapega, A. V.</creator><general>Pleiades Publishing</general><general>Springer Nature B.V</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20240601</creationdate><title>Effect of Cluster Ion Bombardment on the Roughly Polished Surface of Single-Crystal Germanium Wafers</title><author>Nikolaev, I. V. ; Korobeishchikov, N. G. ; Lapega, A. V.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c268t-9e821802a901abd576a845996ff5c0888e070afbeeed17a72fecb99a3ca5d4373</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2024</creationdate><topic>Acoustics</topic><topic>Argon</topic><topic>Clusters</topic><topic>Electronics</topic><topic>Germanium</topic><topic>Ion beams</topic><topic>Ion bombardment</topic><topic>Mathematical and Computational Physics</topic><topic>Physics</topic><topic>Physics and Astronomy</topic><topic>Power spectral density</topic><topic>Radiophysics</topic><topic>Single crystals</topic><topic>Spatial smoothing</topic><topic>Spectral density function</topic><topic>Surface treatment</topic><topic>Theoretical</topic><topic>Wafers</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Nikolaev, I. V.</creatorcontrib><creatorcontrib>Korobeishchikov, N. G.</creatorcontrib><creatorcontrib>Lapega, A. V.</creatorcontrib><collection>CrossRef</collection><jtitle>Moscow University physics bulletin</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Nikolaev, I. V.</au><au>Korobeishchikov, N. G.</au><au>Lapega, A. V.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Effect of Cluster Ion Bombardment on the Roughly Polished Surface of Single-Crystal Germanium Wafers</atitle><jtitle>Moscow University physics bulletin</jtitle><stitle>Moscow Univ. Phys</stitle><date>2024-06-01</date><risdate>2024</risdate><volume>79</volume><issue>3</issue><spage>330</spage><epage>335</epage><pages>330-335</pages><issn>0027-1349</issn><eissn>1934-8460</eissn><abstract>The surface treatment of single-crystal germanium with an argon cluster ion beam has been investigated. The original surface of the germanium wafers was bombarded with argon cluster ions with high (105 eV/atom) and low (10 eV/atom) specific energies. Using an atomic force microscope, images were obtained and a comparison of the surface topography before and after cluster ion bombardment was conducted. The smoothing of the surface was demonstrated using the power spectral density function of roughness in the range of spatial frequencies: 1)
m
—for the high-energy mode; 2)
m
—for the low-energy mode.</abstract><cop>Moscow</cop><pub>Pleiades Publishing</pub><doi>10.3103/S0027134924700462</doi><tpages>6</tpages></addata></record> |
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| source | Springer Nature - Complete Springer Journals |
| subjects | Acoustics Argon Clusters Electronics Germanium Ion beams Ion bombardment Mathematical and Computational Physics Physics Physics and Astronomy Power spectral density Radiophysics Single crystals Spatial smoothing Spectral density function Surface treatment Theoretical Wafers |
| title | Effect of Cluster Ion Bombardment on the Roughly Polished Surface of Single-Crystal Germanium Wafers |
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