Study on Low Temperature Conduction Mechanism of Al Doped ZnO/SiO2/ P-Si Heterojunction

The 3 at% Al doped ZnO thin films were deposited on p-Si substrate with a native SiO2 layer by spray pyrolysis method. Low temperature conduction behaviors were studied by analysis of impedance spectroscopy and low temperature ac conductivity. The results of impedance spectroscopy showed that the gr...

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Veröffentlicht in:	Key engineering materials 2021-11, Vol.904, p.363-368
Hauptverfasser:	Yin, Bang Sheng, Zhou, Xiao Yan
Format:	Artikel
Sprache:	eng
Schlagworte:	Activation energy Aluminum Electrical properties Electrical resistivity Electron conductivity Equivalent circuits Grain boundaries Heterojunctions Impedance spectroscopy Low temperature Silicon dioxide Silicon substrates Spectroscopic analysis Spray pyrolysis Thermal conductivity Thin films Zinc oxide
Online-Zugang:	Volltext
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