Erratum: “Optical spectroscopy for sputtering process characterization” [J. Appl. Phys. 127, 211101 (2020)]
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Veröffentlicht in: | Journal of applied physics 2024-08, Vol.136 (6) |
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container_title | Journal of applied physics |
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creator | Britun, Nikolay Hnilica, Jaroslav |
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doi_str_mv | 10.1063/5.0228273 |
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title | Erratum: “Optical spectroscopy for sputtering process characterization” [J. Appl. Phys. 127, 211101 (2020)] |
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