Residual Stress Characterization in Microelectronic Manufacturing: An Analysis Based on Raman Spectroscopy

In the rapidly evolving era of information and intelligence,microelectronic devices are pivotal across various fields, such as mobile devices, big data computing, electric vehicles, and aerospace. However, the electrical performance of these devices often suffers due to residual stress from microele...

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Veröffentlicht in:	Laser & photonics reviews 2024-07, Vol.18 (7), p.n/a
Hauptverfasser:	Yang, Zhoudong, Wang, Xinyue, Chen, Wei, Tang, Hongyu, Zhang, Rongjun, Fan, Xuejun, Zhang, Guoqi, Fan, Jiajie
Format:	Artikel
Sprache:	eng
Schlagworte:	Devices Electric vehicles Manufacturing Mechanics (physics) microelectronic manufacturing Microelectronics micro‐scale mechanics Raman spectroscopy Raman‐stress relation Residual stress Spectrum analysis Strain analysis Substrates Thermal stress
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