Deposition and characterization of ZnO thin films on corning glass substrate using Magnetron sputtering
The Zinc Oxide (ZnO) thin films were deposited on corning glass substrates using RF Magnetron sputtering at a substrate temperature of 400° C and thicknesses of 1000 nm and 2000 nm. SEM, EDX, XRD, and UV-Vis spectrometers were used to analyse the thin films’ morphological, structural, and optical ch...
Gespeichert in:
| Hauptverfasser: | , , , , , , , |
|---|---|
| Format: | Tagungsbericht |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | 1 |
| container_start_page | |
| container_title | |
| container_volume | 3122 |
| creator | Kumar, K. Naveen Karkal, R. Naina Shaik, Habibuddin Jafri, R. Imran Maligi, Anantha Sunil Salimath, S. Darshan Singh, Omkar Ramya, H. G. |
| description | The Zinc Oxide (ZnO) thin films were deposited on corning glass substrates using RF Magnetron sputtering at a substrate temperature of 400° C and thicknesses of 1000 nm and 2000 nm. SEM, EDX, XRD, and UV-Vis spectrometers were used to analyse the thin films’ morphological, structural, and optical characteristics. SEMwas used to analyse the surface morphology of the thin films. The composition of the created thin films was evaluated using EDX. XRD was used to examine the crystalline structure of the deposited ZnO films. Using the Debye-Scherrer equation, the average sample crystal size was determined. Uv-Vis was used to analyse the optical characteristics of the thin films. The findings showing how well-piezoelectric the produced thin films are may be useful in developing Surface Acoustic Wave Devices. |
| doi_str_mv | 10.1063/5.0215977 |
| format | Conference Proceeding |
| fullrecord | <record><control><sourceid>proquest_scita</sourceid><recordid>TN_cdi_proquest_journals_3069308157</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>3069308157</sourcerecordid><originalsourceid>FETCH-LOGICAL-p133t-8230e1924f3ea7b03e43367768d2598bd631783ed41b2c8d70d98c80c7c447803</originalsourceid><addsrcrecordid>eNotkE1LxDAURYMoOI4u_AcBd0LHl7y2SZcyOiqMzEZB3JQ0TTsZZtKapAv99XY-Vg8Oh3t5l5BbBjMGOT5kM-AsK4Q4IxOWZSwROcvPyQSgSBOe4tcluQphA8BHR05I-2T6LthoO0eVq6leK690NN7-qQPsGvrtVjSuraON3e4CHaHuvLOupe1WhUDDUIXoVTR0CHv6rlpnoh-90A9xn-Xaa3LRqG0wN6c7JZ-L54_5a7JcvbzNH5dJzxBjIjmCYQVPGzRKVIAmRcyFyGXNs0JWdY5MSDR1yiquZS2gLqSWoIVOUyEBp-TumNv77mcwIZabbvBurCwR8gJBskyM1v3RCtrGw59l7-1O-d-SQbkfsszK05D4D-b7ZZY</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype><pqid>3069308157</pqid></control><display><type>conference_proceeding</type><title>Deposition and characterization of ZnO thin films on corning glass substrate using Magnetron sputtering</title><source>AIP Journals Complete</source><creator>Kumar, K. Naveen ; Karkal, R. Naina ; Shaik, Habibuddin ; Jafri, R. Imran ; Maligi, Anantha Sunil ; Salimath, S. Darshan ; Singh, Omkar ; Ramya, H. G.</creator><contributor>P, Thangaraj ; H, Shankar ; K, Mohana Sundaram</contributor><creatorcontrib>Kumar, K. Naveen ; Karkal, R. Naina ; Shaik, Habibuddin ; Jafri, R. Imran ; Maligi, Anantha Sunil ; Salimath, S. Darshan ; Singh, Omkar ; Ramya, H. G. ; P, Thangaraj ; H, Shankar ; K, Mohana Sundaram</creatorcontrib><description>The Zinc Oxide (ZnO) thin films were deposited on corning glass substrates using RF Magnetron sputtering at a substrate temperature of 400° C and thicknesses of 1000 nm and 2000 nm. SEM, EDX, XRD, and UV-Vis spectrometers were used to analyse the thin films’ morphological, structural, and optical characteristics. SEMwas used to analyse the surface morphology of the thin films. The composition of the created thin films was evaluated using EDX. XRD was used to examine the crystalline structure of the deposited ZnO films. Using the Debye-Scherrer equation, the average sample crystal size was determined. Uv-Vis was used to analyse the optical characteristics of the thin films. The findings showing how well-piezoelectric the produced thin films are may be useful in developing Surface Acoustic Wave Devices.</description><identifier>ISSN: 0094-243X</identifier><identifier>EISSN: 1551-7616</identifier><identifier>DOI: 10.1063/5.0215977</identifier><identifier>CODEN: APCPCS</identifier><language>eng</language><publisher>Melville: American Institute of Physics</publisher><subject>Glass substrates ; Magnetron sputtering ; Morphology ; Optical properties ; Piezoelectricity ; Spectrometers ; Surface acoustic wave devices ; Thin films ; Zinc oxide</subject><ispartof>AIP conference proceedings, 2024, Vol.3122 (1)</ispartof><rights>Author(s)</rights><rights>2024 Author(s). Published under an exclusive license by AIP Publishing.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://pubs.aip.org/acp/article-lookup/doi/10.1063/5.0215977$$EHTML$$P50$$Gscitation$$H</linktohtml><link.rule.ids>309,310,314,776,780,785,786,790,4498,23909,23910,25118,27901,27902,76126</link.rule.ids></links><search><contributor>P, Thangaraj</contributor><contributor>H, Shankar</contributor><contributor>K, Mohana Sundaram</contributor><creatorcontrib>Kumar, K. Naveen</creatorcontrib><creatorcontrib>Karkal, R. Naina</creatorcontrib><creatorcontrib>Shaik, Habibuddin</creatorcontrib><creatorcontrib>Jafri, R. Imran</creatorcontrib><creatorcontrib>Maligi, Anantha Sunil</creatorcontrib><creatorcontrib>Salimath, S. Darshan</creatorcontrib><creatorcontrib>Singh, Omkar</creatorcontrib><creatorcontrib>Ramya, H. G.</creatorcontrib><title>Deposition and characterization of ZnO thin films on corning glass substrate using Magnetron sputtering</title><title>AIP conference proceedings</title><description>The Zinc Oxide (ZnO) thin films were deposited on corning glass substrates using RF Magnetron sputtering at a substrate temperature of 400° C and thicknesses of 1000 nm and 2000 nm. SEM, EDX, XRD, and UV-Vis spectrometers were used to analyse the thin films’ morphological, structural, and optical characteristics. SEMwas used to analyse the surface morphology of the thin films. The composition of the created thin films was evaluated using EDX. XRD was used to examine the crystalline structure of the deposited ZnO films. Using the Debye-Scherrer equation, the average sample crystal size was determined. Uv-Vis was used to analyse the optical characteristics of the thin films. The findings showing how well-piezoelectric the produced thin films are may be useful in developing Surface Acoustic Wave Devices.</description><subject>Glass substrates</subject><subject>Magnetron sputtering</subject><subject>Morphology</subject><subject>Optical properties</subject><subject>Piezoelectricity</subject><subject>Spectrometers</subject><subject>Surface acoustic wave devices</subject><subject>Thin films</subject><subject>Zinc oxide</subject><issn>0094-243X</issn><issn>1551-7616</issn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2024</creationdate><recordtype>conference_proceeding</recordtype><recordid>eNotkE1LxDAURYMoOI4u_AcBd0LHl7y2SZcyOiqMzEZB3JQ0TTsZZtKapAv99XY-Vg8Oh3t5l5BbBjMGOT5kM-AsK4Q4IxOWZSwROcvPyQSgSBOe4tcluQphA8BHR05I-2T6LthoO0eVq6leK690NN7-qQPsGvrtVjSuraON3e4CHaHuvLOupe1WhUDDUIXoVTR0CHv6rlpnoh-90A9xn-Xaa3LRqG0wN6c7JZ-L54_5a7JcvbzNH5dJzxBjIjmCYQVPGzRKVIAmRcyFyGXNs0JWdY5MSDR1yiquZS2gLqSWoIVOUyEBp-TumNv77mcwIZabbvBurCwR8gJBskyM1v3RCtrGw59l7-1O-d-SQbkfsszK05D4D-b7ZZY</recordid><startdate>20240618</startdate><enddate>20240618</enddate><creator>Kumar, K. Naveen</creator><creator>Karkal, R. Naina</creator><creator>Shaik, Habibuddin</creator><creator>Jafri, R. Imran</creator><creator>Maligi, Anantha Sunil</creator><creator>Salimath, S. Darshan</creator><creator>Singh, Omkar</creator><creator>Ramya, H. G.</creator><general>American Institute of Physics</general><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope></search><sort><creationdate>20240618</creationdate><title>Deposition and characterization of ZnO thin films on corning glass substrate using Magnetron sputtering</title><author>Kumar, K. Naveen ; Karkal, R. Naina ; Shaik, Habibuddin ; Jafri, R. Imran ; Maligi, Anantha Sunil ; Salimath, S. Darshan ; Singh, Omkar ; Ramya, H. G.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-p133t-8230e1924f3ea7b03e43367768d2598bd631783ed41b2c8d70d98c80c7c447803</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2024</creationdate><topic>Glass substrates</topic><topic>Magnetron sputtering</topic><topic>Morphology</topic><topic>Optical properties</topic><topic>Piezoelectricity</topic><topic>Spectrometers</topic><topic>Surface acoustic wave devices</topic><topic>Thin films</topic><topic>Zinc oxide</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Kumar, K. Naveen</creatorcontrib><creatorcontrib>Karkal, R. Naina</creatorcontrib><creatorcontrib>Shaik, Habibuddin</creatorcontrib><creatorcontrib>Jafri, R. Imran</creatorcontrib><creatorcontrib>Maligi, Anantha Sunil</creatorcontrib><creatorcontrib>Salimath, S. Darshan</creatorcontrib><creatorcontrib>Singh, Omkar</creatorcontrib><creatorcontrib>Ramya, H. G.</creatorcontrib><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Kumar, K. Naveen</au><au>Karkal, R. Naina</au><au>Shaik, Habibuddin</au><au>Jafri, R. Imran</au><au>Maligi, Anantha Sunil</au><au>Salimath, S. Darshan</au><au>Singh, Omkar</au><au>Ramya, H. G.</au><au>P, Thangaraj</au><au>H, Shankar</au><au>K, Mohana Sundaram</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Deposition and characterization of ZnO thin films on corning glass substrate using Magnetron sputtering</atitle><btitle>AIP conference proceedings</btitle><date>2024-06-18</date><risdate>2024</risdate><volume>3122</volume><issue>1</issue><issn>0094-243X</issn><eissn>1551-7616</eissn><coden>APCPCS</coden><abstract>The Zinc Oxide (ZnO) thin films were deposited on corning glass substrates using RF Magnetron sputtering at a substrate temperature of 400° C and thicknesses of 1000 nm and 2000 nm. SEM, EDX, XRD, and UV-Vis spectrometers were used to analyse the thin films’ morphological, structural, and optical characteristics. SEMwas used to analyse the surface morphology of the thin films. The composition of the created thin films was evaluated using EDX. XRD was used to examine the crystalline structure of the deposited ZnO films. Using the Debye-Scherrer equation, the average sample crystal size was determined. Uv-Vis was used to analyse the optical characteristics of the thin films. The findings showing how well-piezoelectric the produced thin films are may be useful in developing Surface Acoustic Wave Devices.</abstract><cop>Melville</cop><pub>American Institute of Physics</pub><doi>10.1063/5.0215977</doi><tpages>9</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0094-243X |
| ispartof | AIP conference proceedings, 2024, Vol.3122 (1) |
| issn | 0094-243X 1551-7616 |
| language | eng |
| recordid | cdi_proquest_journals_3069308157 |
| source | AIP Journals Complete |
| subjects | Glass substrates Magnetron sputtering Morphology Optical properties Piezoelectricity Spectrometers Surface acoustic wave devices Thin films Zinc oxide |
| title | Deposition and characterization of ZnO thin films on corning glass substrate using Magnetron sputtering |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-13T01%3A56%3A04IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_scita&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=Deposition%20and%20characterization%20of%20ZnO%20thin%20films%20on%20corning%20glass%20substrate%20using%20Magnetron%20sputtering&rft.btitle=AIP%20conference%20proceedings&rft.au=Kumar,%20K.%20Naveen&rft.date=2024-06-18&rft.volume=3122&rft.issue=1&rft.issn=0094-243X&rft.eissn=1551-7616&rft.coden=APCPCS&rft_id=info:doi/10.1063/5.0215977&rft_dat=%3Cproquest_scita%3E3069308157%3C/proquest_scita%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=3069308157&rft_id=info:pmid/&rfr_iscdi=true |