Switching the Solubility of Polymers using Intermolecular Reactions and Diffusion of Small Molecules

A two-layer polymeric stack is designed to be converted to a three-layer stack via the diffusion of small molecules between layers. The three-layer stack is composed of a bottom layer carboxylic acid (CA-polymer) that is soluble in aqueous TMAH developer; a middle layer of reacted CA-polymer that be...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Journal of Photopolymer Science and Technology 2023/06/15, Vol.36(5), pp.345-352
Hauptverfasser:	Sitterly, Jacob, Nhan, Justin, Niluxsshun, Moira, Sangwan, Bharti, Smith, Stephen, Macleod, Doug, Brainard, Robert
Format:	Artikel
Sprache:	eng
Schlagworte:	Amines Benzyl bromide Carboxylic acid Carboxylic acids Development Diffusion Diffusion layers Effectiveness Polymer Polymers Protection Reaction Solubility Switching
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!