Mantis Leg-Inspired Flexible Capacitive Pressure Sensor With High Sensitivity and Fast Response for Wearable Devices and Human-Machine Interaction

Flexible pressure sensors are essential for advancing electronic skin and developing flexible wearable devices. Developing pressure sensors with high sensitivity and large-scale preparation in a cost-effective manner is currently a key challenge. Inspired by the structure of a mantis's leg, thi...

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Veröffentlicht in:IEEE sensors journal 2024-06, Vol.24 (12), p.19698-19705
Hauptverfasser: Hong, Weiqiang, Guo, Xiaohui, Hu, Bing, Zhang, Tianxu, Zhu, Xiaowen, Hao, Jianhong, Li, Xianghui, Chen, Yinuo, Zhu, Shengxin, Zhang, Huishan, Hong, Qi, Xu, Yaohua, Zhao, Yunong
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container_end_page 19705
container_issue 12
container_start_page 19698
container_title IEEE sensors journal
container_volume 24
creator Hong, Weiqiang
Guo, Xiaohui
Hu, Bing
Zhang, Tianxu
Zhu, Xiaowen
Hao, Jianhong
Li, Xianghui
Chen, Yinuo
Zhu, Shengxin
Zhang, Huishan
Hong, Qi
Xu, Yaohua
Zhao, Yunong
description Flexible pressure sensors are essential for advancing electronic skin and developing flexible wearable devices. Developing pressure sensors with high sensitivity and large-scale preparation in a cost-effective manner is currently a key challenge. Inspired by the structure of a mantis's leg, this study proposes a bionic flexible capacitive pressure sensor (BFCPS) with a polydimethylsiloxane (PDMS) material and a bionic structural design for the dielectric layer. Particularly, highly reliable pressure sensors are efficiently prepared in a controlled manner using 3-D printing technology. Finite element simulation analysis demonstrates that the biomimetic microstructure significantly enhances sensor performance. The BFCPS with optimized structural parameters demonstrates high sensitivity (0.836 kPa ^{-{1}}\text {)} , wide range up to 333 kPa, fast response/recovery time (40/50 ms), and excellent durability. The outstanding sensing performance of the developed BFCPS has been successfully applied in wearable devices and human-machine interaction.
doi_str_mv 10.1109/JSEN.2024.3392878
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subjects Biomimetic
Bionics
capacitive pressure sensor
Dielectrics
electronic skin
finite element simulation
Microstructure
Parameter sensitivity
Polydimethylsiloxane
Pressure sensors
Recovery time
Robot sensing systems
Sensitivity
Sensors
Structural design
Substrates
Wearable technology
title Mantis Leg-Inspired Flexible Capacitive Pressure Sensor With High Sensitivity and Fast Response for Wearable Devices and Human-Machine Interaction
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