Chemical Vapor Deposition of Tantalum Carbide in the TaBr5–CCl4–Cd System

The tantalum carbide coatings were deposited on substrates made of 12Kh18N10T steel, ZhC6 alloy, and molybdenum by reduction of TaBr5 and CCl4 vapors with cadmium vapors at temperatures of 950–1000 K. The average deposition rate of coatings on molybdenum was ~5 μm/h, on ZhC6 alloy was ~6 μm/h, and o...

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Veröffentlicht in:	Coatings (Basel) 2024-05, Vol.14 (5), p.547
Hauptverfasser:	Krenicky, Tibor, Goncharov, Oleg Y., Kuchar, Jiri, Sapegina, Irina V., Kudlacek, Jan, Faizullin, Ravil R., Korshunov, Alexander I., Cerny, Daniel
Format:	Artikel
Sprache:	eng
Schlagworte:	Austenitic stainless steels Cadmium Carbon Carbon tetrachloride Chemical vapor deposition Coatings Corrosion Hydrocarbons Hydrogen Inhomogeneity Molybdenum Oxidation Phase transitions Polymerization Reagents Substrates Surface layers Tantalum Tantalum carbide Temperature Thermal expansion
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