Modern Scanning Electron Microscopy. 3. Electron Probe

— A review of the electron-probe parameters of a scanning electron microscope and of methods for their measurements is given. Three definitions of the concept of the electron-probe diameter are presented. It is shown that the definition of the probe diameter as the size of the effective square beam...

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Veröffentlicht in:	Surface investigation, x-ray, synchrotron and neutron techniques x-ray, synchrotron and neutron techniques, 2024-02, Vol.18 (1), p.185-209
1. Verfasser:	Novikov, Yu. A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemistry and Materials Science Density distribution Diameters Diaphragms Electron beams Electron density Electron microscopes Electron probes Grooves Inclination angle Materials Science Measurement methods Recording Scanning electron microscopy Surfaces and Interfaces Thin Films
Online-Zugang:	Volltext
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