Scandium Aluminum Nitride Overmoded Bulk Acoustic Resonators for Future Wireless Communication
This work reports on the modeling, fabrication, and experimental characterization of a 13 GHz 30% Scandium-doped Aluminum Nitride (ScAlN) Overmoded Bulk Acoustic Resonator (OBAR) for high-frequency Radio Frequency (RF) applications, notably in 5G technology and beyond. The Finite Element Analysis (F...
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| description | This work reports on the modeling, fabrication, and experimental characterization of a 13 GHz 30% Scandium-doped Aluminum Nitride (ScAlN) Overmoded Bulk Acoustic Resonator (OBAR) for high-frequency Radio Frequency (RF) applications, notably in 5G technology and beyond. The Finite Element Analysis (FEA) optimization process targets the top and bottom metal electrode thicknesses, balancing the electromechanical coupling coefficient and acoustic energy distribution to enhance device Figure of Merit (FOM). Experimental results on fabricated devices employing platinum and aluminum as bottom and top electrode, respectively, demonstrate a quality factor at resonance (Qs) of 210 and a coupling coefficient (kt2) of 5.2% at 13.3 GHz for the second bulk thickness overtone, effectively validating the simulation framework and hinting at the possible implementation of OBARs for advanced RF filters in 5G networks. |
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The Finite Element Analysis (FEA) optimization process targets the top and bottom metal electrode thicknesses, balancing the electromechanical coupling coefficient and acoustic energy distribution to enhance device Figure of Merit (FOM). Experimental results on fabricated devices employing platinum and aluminum as bottom and top electrode, respectively, demonstrate a quality factor at resonance (Qs) of 210 and a coupling coefficient (kt2) of 5.2% at 13.3 GHz for the second bulk thickness overtone, effectively validating the simulation framework and hinting at the possible implementation of OBARs for advanced RF filters in 5G networks.</description><identifier>EISSN: 2331-8422</identifier><language>eng</language><publisher>Ithaca: Cornell University Library, arXiv.org</publisher><subject>5G mobile communication ; Aluminum nitride ; Bulk acoustic wave devices ; Coupling coefficients ; Electrodes ; Energy distribution ; Figure of merit ; Finite element method ; Radio frequency ; Resonators ; Scandium ; Thickness ; Wireless communications</subject><ispartof>arXiv.org, 2024-04</ispartof><rights>2024. This work is published under http://arxiv.org/licenses/nonexclusive-distrib/1.0/ (the “License”). 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| subjects | 5G mobile communication Aluminum nitride Bulk acoustic wave devices Coupling coefficients Electrodes Energy distribution Figure of merit Finite element method Radio frequency Resonators Scandium Thickness Wireless communications |
| title | Scandium Aluminum Nitride Overmoded Bulk Acoustic Resonators for Future Wireless Communication |
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