A Sc0.096Al0.904N-Based Bimorph Piezoelectric MEMS Microphone Using 3 × 3 Circular Diaphragms

This work presents a bimorph piezoelectric microelectromechanical system microphone (b-PMM) with high receiving sensitivity and signal-to-noise ratio (SNR) based on an array of circular diaphragms in a size of 0.375\times 3\times3 mm3. The b-PMM is fabricated using Sc0.096 Al0.904 N with thickness...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	IEEE transactions on electron devices 2024-05, Vol.71 (5), p.3162-3168
Hauptverfasser:	Hu, Bohao, Liu, Wenjuan, Liu, Yan, Yang, Chaoxiang, Wang, Zekai, Lu, Liangyu, Cai, Yao, Guo, Shishang, Sun, Chengliang
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustic measurement Acoustic noise Acoustics Arrays Bimorph Bimorphs Capacitance circular diaphragm array Diaphragms (mechanics) Dielectrics Electrodes Harmonic distortion Mechanical analysis Microelectromechanical systems Microphones Noise sensitivity piezoelectric microelectromechanical system microphone (PMM) Piezoelectricity scandium-doped aluminum nitride (ScAlN) Sensitivity Signal to noise ratio
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Schreiben Sie den ersten Kommentar!