Frequency Dependence of Parameters of an Inductive RF Discharge Placed in a Weak Magnetic Field
The properties of an inductive RF discharge placed in a longitudinal external magnetic field with an induction of less than 70 G at frequencies of 2, 4, and 13.56 MHz are studied. The dependences of the region of existence of the discharge, the efficiency of the RF power input and the structure of t...
Gespeichert in:
Veröffentlicht in: | Plasma physics reports 2024, Vol.50 (1), p.77-88 |
---|---|
Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
container_end_page | 88 |
---|---|
container_issue | 1 |
container_start_page | 77 |
container_title | Plasma physics reports |
container_volume | 50 |
creator | Nikonov, A. M. Vavilin, K. V. Zadiriev, I. I. Dvinin, S. A. Kral’kina, E. A. |
description | The properties of an inductive RF discharge placed in a longitudinal external magnetic field with an induction of less than 70 G at frequencies of 2, 4, and 13.56 MHz are studied. The dependences of the region of existence of the discharge, the efficiency of the RF power input and the structure of the RF magnetic field on the external magnetic field induction are studied experimentally. The experimental results are compared with calculations based on a previously developed electromagnetic discharge model. It is shown that the local maximum of the plasma density observed at weak magnetic fields is associated with the resonant excitation of waves in the plasma source. The excited wave is close to a transverse helicon at a frequency of 2 MHz, and its properties approach the Trivelpiece–Gould wave at a frequency of 13.56 MHz,. |
doi_str_mv | 10.1134/S1063780X23601785 |
format | Article |
fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_journals_3039886435</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>3039886435</sourcerecordid><originalsourceid>FETCH-LOGICAL-c316t-88a54c5b9eb3cf0e6f20f649e8297a1701b095129fef2c51595ad3bab0a233613</originalsourceid><addsrcrecordid>eNp1UE1LAzEQXUTBWv0B3gKeVzPJJps9SutqoWLxA70t2eykbm2zNdkK_femVPAgnuYN72OYlyTnQC8BeHb1BFTyXNE3xiWFXImDZABCslQWXB1GHOl0xx8nJyEsKAVQAgZJVXr83KAzWzLGNbomQiSdJTPt9Qp79GG3aUcmrtmYvv1C8liScRvMu_ZzJLOlNtiQ1hFNXlF_kHs9d9i3hpQtLpvT5MjqZcCznzlMXsqb59FdOn24nYyup6nhIPtUKS0yI-oCa24sRWkZtTIrULEi15BTqGkhgBUWLTMCRCF0w2tdU804l8CHycU-d-27-E_oq0W38S6erDjlhVIy4yKqYK8yvgvBo63Wvl1pv62AVrseqz89Rg_be0LUujn63-T_Td84dXNY</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>3039886435</pqid></control><display><type>article</type><title>Frequency Dependence of Parameters of an Inductive RF Discharge Placed in a Weak Magnetic Field</title><source>SpringerNature Journals</source><creator>Nikonov, A. M. ; Vavilin, K. V. ; Zadiriev, I. I. ; Dvinin, S. A. ; Kral’kina, E. A.</creator><creatorcontrib>Nikonov, A. M. ; Vavilin, K. V. ; Zadiriev, I. I. ; Dvinin, S. A. ; Kral’kina, E. A.</creatorcontrib><description>The properties of an inductive RF discharge placed in a longitudinal external magnetic field with an induction of less than 70 G at frequencies of 2, 4, and 13.56 MHz are studied. The dependences of the region of existence of the discharge, the efficiency of the RF power input and the structure of the RF magnetic field on the external magnetic field induction are studied experimentally. The experimental results are compared with calculations based on a previously developed electromagnetic discharge model. It is shown that the local maximum of the plasma density observed at weak magnetic fields is associated with the resonant excitation of waves in the plasma source. The excited wave is close to a transverse helicon at a frequency of 2 MHz, and its properties approach the Trivelpiece–Gould wave at a frequency of 13.56 MHz,.</description><identifier>ISSN: 1063-780X</identifier><identifier>EISSN: 1562-6938</identifier><identifier>DOI: 10.1134/S1063780X23601785</identifier><language>eng</language><publisher>Moscow: Pleiades Publishing</publisher><subject>Atomic ; Electromagnetic induction ; Magnetic fields ; Magnetic induction ; Magnetic properties ; Molecular ; Optical and Plasma Physics ; Physics ; Physics and Astronomy ; Plasma density ; Plasma Diagnostics ; Radio frequency discharge</subject><ispartof>Plasma physics reports, 2024, Vol.50 (1), p.77-88</ispartof><rights>Pleiades Publishing, Ltd. 2024. ISSN 1063-780X, Plasma Physics Reports, 2024, Vol. 50, No. 1, pp. 77–88. © Pleiades Publishing, Ltd., 2024.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c316t-88a54c5b9eb3cf0e6f20f649e8297a1701b095129fef2c51595ad3bab0a233613</citedby><cites>FETCH-LOGICAL-c316t-88a54c5b9eb3cf0e6f20f649e8297a1701b095129fef2c51595ad3bab0a233613</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1134/S1063780X23601785$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1134/S1063780X23601785$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,780,784,27924,27925,41488,42557,51319</link.rule.ids></links><search><creatorcontrib>Nikonov, A. M.</creatorcontrib><creatorcontrib>Vavilin, K. V.</creatorcontrib><creatorcontrib>Zadiriev, I. I.</creatorcontrib><creatorcontrib>Dvinin, S. A.</creatorcontrib><creatorcontrib>Kral’kina, E. A.</creatorcontrib><title>Frequency Dependence of Parameters of an Inductive RF Discharge Placed in a Weak Magnetic Field</title><title>Plasma physics reports</title><addtitle>Plasma Phys. Rep</addtitle><description>The properties of an inductive RF discharge placed in a longitudinal external magnetic field with an induction of less than 70 G at frequencies of 2, 4, and 13.56 MHz are studied. The dependences of the region of existence of the discharge, the efficiency of the RF power input and the structure of the RF magnetic field on the external magnetic field induction are studied experimentally. The experimental results are compared with calculations based on a previously developed electromagnetic discharge model. It is shown that the local maximum of the plasma density observed at weak magnetic fields is associated with the resonant excitation of waves in the plasma source. The excited wave is close to a transverse helicon at a frequency of 2 MHz, and its properties approach the Trivelpiece–Gould wave at a frequency of 13.56 MHz,.</description><subject>Atomic</subject><subject>Electromagnetic induction</subject><subject>Magnetic fields</subject><subject>Magnetic induction</subject><subject>Magnetic properties</subject><subject>Molecular</subject><subject>Optical and Plasma Physics</subject><subject>Physics</subject><subject>Physics and Astronomy</subject><subject>Plasma density</subject><subject>Plasma Diagnostics</subject><subject>Radio frequency discharge</subject><issn>1063-780X</issn><issn>1562-6938</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2024</creationdate><recordtype>article</recordtype><recordid>eNp1UE1LAzEQXUTBWv0B3gKeVzPJJps9SutqoWLxA70t2eykbm2zNdkK_femVPAgnuYN72OYlyTnQC8BeHb1BFTyXNE3xiWFXImDZABCslQWXB1GHOl0xx8nJyEsKAVQAgZJVXr83KAzWzLGNbomQiSdJTPt9Qp79GG3aUcmrtmYvv1C8liScRvMu_ZzJLOlNtiQ1hFNXlF_kHs9d9i3hpQtLpvT5MjqZcCznzlMXsqb59FdOn24nYyup6nhIPtUKS0yI-oCa24sRWkZtTIrULEi15BTqGkhgBUWLTMCRCF0w2tdU804l8CHycU-d-27-E_oq0W38S6erDjlhVIy4yKqYK8yvgvBo63Wvl1pv62AVrseqz89Rg_be0LUujn63-T_Td84dXNY</recordid><startdate>2024</startdate><enddate>2024</enddate><creator>Nikonov, A. M.</creator><creator>Vavilin, K. V.</creator><creator>Zadiriev, I. I.</creator><creator>Dvinin, S. A.</creator><creator>Kral’kina, E. A.</creator><general>Pleiades Publishing</general><general>Springer Nature B.V</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>2024</creationdate><title>Frequency Dependence of Parameters of an Inductive RF Discharge Placed in a Weak Magnetic Field</title><author>Nikonov, A. M. ; Vavilin, K. V. ; Zadiriev, I. I. ; Dvinin, S. A. ; Kral’kina, E. A.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c316t-88a54c5b9eb3cf0e6f20f649e8297a1701b095129fef2c51595ad3bab0a233613</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2024</creationdate><topic>Atomic</topic><topic>Electromagnetic induction</topic><topic>Magnetic fields</topic><topic>Magnetic induction</topic><topic>Magnetic properties</topic><topic>Molecular</topic><topic>Optical and Plasma Physics</topic><topic>Physics</topic><topic>Physics and Astronomy</topic><topic>Plasma density</topic><topic>Plasma Diagnostics</topic><topic>Radio frequency discharge</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Nikonov, A. M.</creatorcontrib><creatorcontrib>Vavilin, K. V.</creatorcontrib><creatorcontrib>Zadiriev, I. I.</creatorcontrib><creatorcontrib>Dvinin, S. A.</creatorcontrib><creatorcontrib>Kral’kina, E. A.</creatorcontrib><collection>CrossRef</collection><jtitle>Plasma physics reports</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Nikonov, A. M.</au><au>Vavilin, K. V.</au><au>Zadiriev, I. I.</au><au>Dvinin, S. A.</au><au>Kral’kina, E. A.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Frequency Dependence of Parameters of an Inductive RF Discharge Placed in a Weak Magnetic Field</atitle><jtitle>Plasma physics reports</jtitle><stitle>Plasma Phys. Rep</stitle><date>2024</date><risdate>2024</risdate><volume>50</volume><issue>1</issue><spage>77</spage><epage>88</epage><pages>77-88</pages><issn>1063-780X</issn><eissn>1562-6938</eissn><abstract>The properties of an inductive RF discharge placed in a longitudinal external magnetic field with an induction of less than 70 G at frequencies of 2, 4, and 13.56 MHz are studied. The dependences of the region of existence of the discharge, the efficiency of the RF power input and the structure of the RF magnetic field on the external magnetic field induction are studied experimentally. The experimental results are compared with calculations based on a previously developed electromagnetic discharge model. It is shown that the local maximum of the plasma density observed at weak magnetic fields is associated with the resonant excitation of waves in the plasma source. The excited wave is close to a transverse helicon at a frequency of 2 MHz, and its properties approach the Trivelpiece–Gould wave at a frequency of 13.56 MHz,.</abstract><cop>Moscow</cop><pub>Pleiades Publishing</pub><doi>10.1134/S1063780X23601785</doi><tpages>12</tpages></addata></record> |
fulltext | fulltext |
identifier | ISSN: 1063-780X |
ispartof | Plasma physics reports, 2024, Vol.50 (1), p.77-88 |
issn | 1063-780X 1562-6938 |
language | eng |
recordid | cdi_proquest_journals_3039886435 |
source | SpringerNature Journals |
subjects | Atomic Electromagnetic induction Magnetic fields Magnetic induction Magnetic properties Molecular Optical and Plasma Physics Physics Physics and Astronomy Plasma density Plasma Diagnostics Radio frequency discharge |
title | Frequency Dependence of Parameters of an Inductive RF Discharge Placed in a Weak Magnetic Field |
url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-23T13%3A35%3A36IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Frequency%20Dependence%20of%20Parameters%20of%20an%20Inductive%20RF%20Discharge%20Placed%20in%20a%20Weak%20Magnetic%20Field&rft.jtitle=Plasma%20physics%20reports&rft.au=Nikonov,%20A.%20M.&rft.date=2024&rft.volume=50&rft.issue=1&rft.spage=77&rft.epage=88&rft.pages=77-88&rft.issn=1063-780X&rft.eissn=1562-6938&rft_id=info:doi/10.1134/S1063780X23601785&rft_dat=%3Cproquest_cross%3E3039886435%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=3039886435&rft_id=info:pmid/&rfr_iscdi=true |