Some Properties of Argon as an Actinometric Atom. I. Metastable Levels Excitation

Using argon as an actinometric atom requires knowledge of its electron excitation kinetics. In turn, this kinetics is largely determined by electron impact excitation cross-sections as well as quenching rate constants for the argon metastable levels. Unfortunately, the published experimental data fo...

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Veröffentlicht in:	Russian microelectronics 2023-12, Vol.52 (Suppl 1), p.S285-S289
1. Verfasser:	Kudrya, V. P.
Format:	Artikel
Sprache:	eng
Schlagworte:	Argon Cross-sections Diagnostics Electrical Engineering Electron impact excitation Engineering Kinetics Rate constants
Online-Zugang:	Volltext
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