Modification in Adsorption Properties of Graphene During the Development of Viral Biosensors

The well-known effect of the local interaction between graphene and photoresist (LIGF) during the creation of biosensors is shown to lead to non-uniform distribution of compressive stresses, which deteriorates the adsorption properties of graphene, parameter reproducibility, and detecting ability of...

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Veröffentlicht in:Semiconductors (Woodbury, N.Y.) N.Y.), 2023-12, Vol.57 (12), p.524-530
Hauptverfasser: Eliseev, I. A., Gushchina, E. A., Klotchenko, S. A., Lebedev, A. A., Lebedeva, N. M., Lebedev, S. P., Nashchekin, A. V., Petrov, V. N., Puzyk, M. V., Roenkov, A. D., Smirnov, A. N., Tanklevskaya, E. M., Usikov, A. S., Shabunina, E. I., Schmidt, N. M.
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Sprache:eng
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