On the Choice of Monitoring Procedure of Optical Coating Deposition

Theoretical results are formulated to assess the strength of the effect of self-compensation of errors in layer thicknesses of multilayer optical coatings. They are applicable to any method of optical monitoring of the deposition process. It is shown that considering a possible presence of a strong...

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Veröffentlicht in:	Moscow University physics bulletin 2023-12, Vol.78 (6), p.783-789
Hauptverfasser:	Tikhonravov, A. V., Lagutina, A. A., Lagutin, Iu. S., Lukyanenko, D. V., Sharapova, S. A., Sharov, A. N., Yagola, A. G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Coatings Deposition Error compensation Mathematical and Computational Physics Monitoring Multilayers Optical coatings Physics Physics and Astronomy Self compensation Theoretical Theoretical and Mathematical Physics Thickness
Online-Zugang:	Volltext
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