Study of the Chemical Composition of a Multilayer C/Co/Cr System by Low-Energy Ion-Beam Action

The issues of the chemical homogeneity of films obtained by magnetron sputtering are considered, and the rate of profiling of nanoscale layers of some 3 d metals is estimated. The objects of study are C/Cr, C/Co, and C/Co/Cr films synthesized by magnetron sputtering on polycrystalline silicon. Depos...

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Veröffentlicht in:	Surface investigation, x-ray, synchrotron and neutron techniques x-ray, synchrotron and neutron techniques, 2023-12, Vol.17 (Suppl 1), p.S310-S316
Hauptverfasser:	Huseynov, T. Z., Bakieva, O. R., Khametova, E. F., Valeev, R. G., Beltyukov, A. N.
Format:	Artikel
Sprache:	eng
Schlagworte:	Argon Chemical composition Chemical elements Chemistry and Materials Science Chromium Cobalt Homogeneity Ion beams Ion etching Magnetron sputtering Materials Science Multilayers Polysilicon Surfaces and Interfaces Thin Films
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